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Bruker Nano Analytics, headquartered in Berlin, Germany is a worldwide leading manufacturer of systems for compositional and structural analysis at the micro- and nano-scale for electron microscopes and using X-ray fluorescence spectrometers.

As a research-focused company, we invest in the development of innovative products to satisfy the needs of our markets and to give our clients the opportunity to perform their work using the most modern equipment available. Our instruments are used in research, education and a wide range of industries, including chemistry, pharmaceuticals, semiconductor, life science, nanotechnology. Our spectrometry product lines comprise:

  • • QUANTAX spectrometers for microanalysis on scanning and transmission electron microscopes (EDS and WDS),
  • • The XTrace micro-spot X-ray source for attachment to scanning electron microscopes,
  • • The S2 PICOFOX spectrometer for total reflection X-ray fluorescence elemental analysis(TXRF),
  • • The M4 TORNADO µ-XRF spectrometer for fast elemental distribution analysis.
  • The products for structural analysis consist of:

  • • QUANTAX EBSD, the fast and easy-to-use electron backscatter diffraction system (EBSD) for SEM
  • • Micro-CT for SEM, the computed X-ray microtomography attachment for SEM.

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    Bruker meets the challenges of nanoanalysis. Bruker AXS Microanalysis is proud to present solutions for its QUANTAX microanalysis systems that allow the SEM analyst to obtain elemental information on the nanometer scale.


    X-ray micro and nano-analysis is an analytical technique for determination of the chemical composition of solid samples, thin layers or particles in electron microscopes. Using our QUANTAX energy dispersive X-ray spectrometry system (EDS) it is possible to detect and analyze all elements from beryllium to americium simultaneously. Obtaining elemental information from a sample volume of only a few cubic microns – or even nanometers – and providing relative detection limits in the order of a tenth of a mass percent makes X-ray microanalysis one of the most sensitive analysis methods available.

    The QUANTAX family of EDS systems offered by Bruker delivers reliable results across a broad range of applications with unprecedented speed, accuracy and ease of use.

    Bruker's unique, liquid nitrogen free XFlash® 6 silicon drift detector (SDD) series together with the state-of-the-art hybrid pulse processor SVE 6 delivers both the highest possible energy resolution and analysis speed, both on scanning electron microscopes and on (scanning) transmission electron microscopes.



    QUANTAX FlatQUAD is the EDS microanalysis system based on the revolutionary XFlash® FlatQUAD. This special annular four-channel silicon drift detector is inserted between SEM pole piece and sample, achieving maximum solid angle in EDS. In combination with the ESPRIT analytical software suite QUANTAX FlatQUAD provides previously unheard of mapping performance, even for the most difficult samples.


    The M4 Tornado is a versatile instrument for fast and accurate high-resolution analysis of both small and large specimens. Samples require little or even no preparation at all for examination.


    Electron backscatter diffraction relies on the effect that a number of the electrons hitting a crystallite in a sample in the scanning electron microscope is scattered on the lattice plains of this crystallite. These electrons, carrying information on the crystal structure, are recorded with a special EBSD detector. In scanning the sample information on its microstructure can be compiled, like crystallinity, present phases, grain sizes, orientations, lattice strain, deformation and many more. QUANTAX EBSD is available with the unique ARGUS™ forescattered / backscattered electron imaging system for colorful orientation contrast images.


    OPTiMUS™ TKD Detector Head
    The OPTIMUS™ TKD detector head, as an addendum to QUANTAX EBSD, was specially designed to provide the best sample-detector geometry for Transmission Kikuchi Diffraction in the scanning electron microscope. It is user-interchangeable with the standard EBSD detector head of all Bruker e–Flash EBSD detectors. OPTIMUS™ integrates the ARGUS™ direct electron detection system for microstructural images at the highest possible resolution.


    Micro-CT for SEM
    X-ray micro-focus computer tomography (Micro-CT) is a non-destructive experimental technique where the 3D internal microstructure of the sample is virtually reconstructed with micrometer accuracy using X-ray shadow images of different orientations of the sample. Micro-CT for SEM adds a unique capability to acquire and visualize 2D/3D micromorphology throughout the entire sample volume with a SEM.


    Superior in performance, compact in size: the new XSense. Bruker’s high-precision wavelength-dispersive X-ray spectrometer for scanning electron microscopes incorporates the latest detector technologies and provides a range of benefits that are hard to beat.


    XTrace is a micro-spot X-ray source for attachment to almost any SEM with a free inclined port on the specimen chamber. It adds the capabilities of a complete micro-XRF spectrometer to the microscope. Limits of detection are improved 20 to 50-fold in the mid to heavy element range. Additionally, larger sample volumes become accessible as X-rays have a higher information depth than electrons.


    Bruker 5-on-1
    With the introduction of the new XSense WD spectrometer and the new XTrace X-ray source for Micro-XRF on SEM, Bruker is the first company to offer all 5 analytical techniques, EDS, WDS, EBSD, Micro-XRF and Micro-CT, for the SEM. Another step ahead is the new 4-in-1 software ESPRIT 2.0., which seamlessly integrates EDS, EBSD, WDS and Micro-XRF under a single user interface and allows researchers to combine data obtained by these complementary methods.

    Images   Products
    Bruker QUANTAX X-ray spectrometer for electron microscopy

    The Bruker QUANTAX X-ray spectrometer for electron microscopy (click on image to enlarge)

      QUANTAX for SEM
      S2 PICOFOX
      M4 TORNADO
    Bruker XFlash 6 detector series for SEM and TEM

    The current Bruker XFlash® 6 detector series for SEM and TEM (click on image to enlarge)

      Micro-CT for SEM
      QUANTAX Micro-XRF
    The e-Flash high resolution EBSD detector

    The e-Flash high resolution EBSD detector (click on image to enlarge)

    The e-Flash high resolution EBSD detector

    OPTIMUS™ TKD detetcor head(click on image to enlarge)

    The Bruker M4 TORNADO fast 2D XRF spectrometer

    The Bruker M4 TORNADO fast 2D micro-XRF spectrometer (click on image to enlarge)

    The Bruker S2 PICOFO total reflection X-ray fluorescence spectrometer for trace analysis

    The Bruker S2 PICOFOX total reflection X-ray fluorescence spectrometer for trace analysis (click on image to enlarge)

    The XSense WD spectrometer

    The XSense WD spectrometer for highly sensitive element analysis in the low energy range (click on image to enlarge)

    The XTrace micro-spot X-ray source for micro-XRF analysis on scanning electron microscopes

    The XTrace micro-spot X-ray source for micro-XRF analysis on scanning electron microscopes (click on image to enlarge)


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