PI Showroom

New Encapsulated Piezo Actuators for High-Reliability Applications in the Semiconductor Industry (184 KB)

This paper explains DC- and AC-degradation mechanisms as well as the unique design of the PICMA® co-fired actuators which is properly adapted to both load cases. Besides some characteristics of the actuators results of DC- and AC-reliability investigations are presented.

Tools for Microscopy, Imaging, Biotech (2.1 MB)

Piezo Stages, Lens Positioners & Scanners, Steering Mirrirs, Actuators

Overview: PI Products for Nanopositioning (2.1 MB)

Piezo Stages, Nanopositioning Systems, Ultra-Precision Actuators & Motors

New Ultrasonic Piezoelectric Actuator for Nanopositioning (436 KB)

Physik Instrumente (PI) has developed a new type of ultrasonic piezoelectric actuator which can be used effectively in direct linear drives. The actuators are of simple construction and allow design of very compact, fast and inexpensive micropositioning systems.

Hybrid Actuators for Large Travel Range and Extreme High Resolution (840 KB)

Traditional motor drives can be used for large movements, but the resolution is far from the requirements for nanotechnology. The paper describes new hybrid systems designs such as the combination of piezoelectric and motorized systems with a long travel range and extremely high resolution.

Sub-Nanometer Precision Hybrid Positioning Systems for Vertical Inspection Tools in Nanotechnology and Semiconductors (264 KB)

This paper describes a new adaptronic product design, specially prepared for vertical motion of optics for inspection or profiling systems. Simultaneous control of piezo flexure actuators and motorized drives provides inches of travel with nanometer to subnanometer resolution.

Parallel-Kinematic 6D Alignment System with Sub-Micrometer Accuracy (280 KB)

PI’s hexapod parallel kinematic structures have been employed in ultra-precise positioning and alignment applications for a decade. Examples are precision alignment of satellite antennas, control of secondary mirrors (astronomical telescopes) and industrial handling and micromachining systems.

Reliability & Lifetime of Multilayer Piezo Actuators. The paper describes the development and lifetime tests of ceramic encapsulated actuators in comparision with conventional polymer coated piezo actuators. Dynamic operation with a new internal electrode design for stress reduction as well as special external electrodes for high-current applications are discussed.

Enhancing the Analog-Output Resolution of the Latest NI DAQ Hardware (572 KB)

The latest generation of National Instruments analog I/O hardware is capable of extraordinary speeds and up to 16-bit analog output (AO) resolution. A newlypatented i technology, originally developed for ultrademanding nanopositioning applications, allows users to extend their digital-to-analog (DAC) resolution well beyond 16 bits. An example application generates waveforms with amplitudes of 0.0001V, well below one least-significant-bit (LSB) for the hardware – in fact, approaching 24 bits.

Interfacing Fast Nanopositioners to Track-Following Servos (336 KB)

The combination of PI’ s E-712 controller and National Instruments’ FPGA-based automation hardware and software form a powerful, flexible platform for integration engineers facing an onslaught of new head test requirements, including higher throughputs and potential production integration of track-following servos on the spinstand. By combining unmatched responsiveness in conventional closed-loop nanopositioning with new feedforward capability which facilitates integration into external tracking servos, E-712 helps preserve capital investments by eliminating obsolescence due to advancing production-test needs.