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| Park Systems – Nanotechnology Solutions Partner |
| Park Systems serves its customers with a complete range of AFM solutions including AFM systems, options, and software, along with global service and support. |
| Park Systems provides original and innovative AFM solutions for the most accurate nanoscale measurement. In nanoscale metrology, having data that is repeatable, reproducible, and reliable is just as crucial as resolution. The innovative crosstalk-elimination (XE) metrology platform ushered in a new era of nanometrology that overcomes non-linearity and non-orthogonality associated with conventional piezotube based systems. Park Systems' innovative AFM technology is a disruptive market force and it expands the application of nanometrology beyond the limits of conventional AFM technology. |
| Park Systems promotes sustainable, long-term growth of its AFM business by constantly seeking to address the changing needs of AFM users. Our comprehensive portfolio of products, software, services, and expertise is designed and engineered to help customers achieve the nanometrology performance that meets the needs and requirements of present and future applications. Since improvements in nanometrology today are key to enabling tomorrow's research, analysis, processing and product manufacturing, our innovative technology and market leadership in the field of nanometrology secure our future at the forefront of the AFM industry.
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Park Systems Showroom |
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How to evaluate an AFM? (pdf) |
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NX10 Product Brochure (856 KB)
Data accuracy is of paramount importance to nanotechnology researchers as the credibility of their research depends upon accurate results. The NX10, the world's most accurate AFM, is the flagship AFM of Park Systems' new product line. The NX10 brings unparalleled imaging accuracy, scan speeds, and tip life to the next generation of researchers, all at an affordable price. |
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Scanning_Thermal_Microscopy (SThM) (pdf) |
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True non-contact AFM for soft biological samples (pdf) |
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True non-contact mode vs. tapping imaging (pdf) |
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True non-contact mode (pdf) |
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XE-NSOM (700 KB) XE-NSOM is specially designed and tailored for advanced optical measurements including Near-field Scanning Optical Microscopy (NSOM), Raman Spectroscopy, and Confocal Microscopy. |
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Ultimate Resolution of AFM in air (pdf) |
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Ion Conductance Microscope (pdf) |
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Basic Contact AFM & Dynamic Force Microscope (pdf) |
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XE-150 (1.1 MB)
With the arrival of the XE-150, Park Systems' large sample AFM, Non-Contact AFM imaging has become the most feasible and practical way to scan your large samples with the ultimate AFM resultion and reliability. The XY motorized sample stage is optimized for large sample placement and allows full travel over the entire sample. |
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Force-distance Spectroscopy (pdf) |
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Lateral-force Spectroscopy (pdf) |
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Phase Imaging & Phase Detection Microscopy (pdf) |
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Conductive AFM (pdf) |
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XE-100 (570 KB)
The XE-100 is s a mid-priced system that provides the ultimate AFM/SPM solution for Non-Contact nanometrology of small samples in data storage, semiconductors, nanoscience, materials science, polymers, and electrochemistry. |
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Electric Force Microscopy (pdf) |
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Force Modulation Microscopy (pdf) |
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Magnetic Force Microscopy (pdf) |
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NanoIndentation (pdf) |
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XE-120 (840 KB) For combined capability of XE-AFM and Inverted Optical Microscope |
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Nanolithograpy (pdf) |
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Scanning Capacitance Microscopy (pdf) |
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AFM and Confocal Microscopy (pdf) |
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XE-70 (670 KB) Affordable, Research-Grade AFM with Flexible Sample Handling |
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Scanning Tunneling Microscopy (pdf) |
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Atomic Force Microscopy Investigation of 1D Structures Utilizing the XE-series Instruments (pdf) |
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XE-HDM (760 KB) Automatic Defect Review AFM for Hard Disk Media and Substrates |
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Characterization of Epitaxially Grown MnAs Films Using AFM and MFM (pdf) |
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Characterization of Organic Photovoltaic Cells (pdf) |
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XE-WAFER (890 KB) Automated Industrial AFM for In-line wafer Inspection and Metrology |
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Patterned Arrays of Magnetic Nanostructures (pdf) |
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Production and Measurement of Nanodot Array (pdf) |
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XE-PTR (745 KB) Automated Industrial AFM for Metrology of Read/Write Heads |
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Surface Morphology of Electrospun Fibers (pdf) |
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Surface Topography Considerations of Patterned Sapphire Substrates for Blue/Green Light Emitting Diode (pdf) |
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XE-3DM (960 KB) Automated Industrial AFM for High-Resolution 3D Metrology |
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AFM Metrology Considerations of Hard Disk Manufacturing (pdf) |
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Automatic Defect Review AFM for Hard Disk Media and Substrates (pdf) |
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XE-Bio (650 KB) The XE-Bio is an innovative yet user-friendly Atomic Force Microscope desidned specifically for biomedical and other advanced life scien research. The revolutionary Scanning Ion Conductance Mode (SICM) is specifically designed for non-invasive in-liquid imaging. |
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New 3D-AFM for High Resolution Sidewall Imaging (pdf) |
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Patterned Arrays of Magnetic Nanostructures (pdf) |
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Chemical Mechanical Polishing (CMP) Metrology with Advanced AFM Surface Profile (pdf) |
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Critical Dimension Measurement of High Aspect Ratio Trench with XE AFM (pdf) |
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New 3D-AFM for High Resolution Sidewall Imaging (pdf) |
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Products |
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XE-3DM |
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Research AFMs |
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Industrial AFMs |
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Innovative Atomic Force Microscopy - bridging the gap to real world investigation |
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Characterization of Epitaxially Grown MnAs Films Using AFM and MFM Equipment |
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