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Nanoplas is an equipment manufacturer specializing in innovative dry processing for the next generation of IC devices. Their process tools are used at the most frequent steps in the complex production flow of integrated circuits, for photoresist stripping, isotropic etching, advanced surface preparation and contamination removal.

Address: Scientific Center of Orsay, Buil. 503 - BP01
City: Orsay
Postcode: 91401
Country/Region: France
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