Chemnitz University of Technology - Center for Microtechnologies (ZfM)
The institute is active in the fields of advanced technologies for microelectronics, microsystems and silicon micromachining as well as nanotechnologies.
| Address: | Reichenhainer Strasse 70 |
| City: | Chemnitz |
| State/Province: | |
| Postcode: | 09126 |
| Country/Region: | Germany |
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