ENAS deals with smart systems integration with micro- and nanotechnologies. Reasearch focuses on development of MEMS/NEMS, 3D-integration and reliability.
Address: | Fraunhofer-Einrichtung für Elektronische Nanosysteme, Reichenhainer Str. 88 |
City: | Chemnitz |
State/Province: | |
Postcode: | 09126 |
Country/Region: | Germany |