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(Site in German) The BMBF supported research project on metal gate electrodes and epitaxial oxides as gate stacks for future CMOS logic and memory generations (MEGA EPOS) refers to the BMBF research program IKT2020 - Elektronik und Mikrosysteme. The consortium is coordinated by Gesellschaft für Angewandte Mikro- und Optoelektronik (AMO) and consists of seven partners acting from basic research to application.
c/o AMO, Dr.-Ing. Max Lemme, Otto-Blumenthal-Strasse 25