Ritsumeikan University Micro Nanoscience Integrated Systems
Research target is establishment of new evaluation technique for MEMS / NEMS material properties. Research of silicon nanolithography technique and development of MEMS/NEMS devices are also performed.
| Address: | 1-1-1 Nojihigashi, Kusatsu-shi |
| City: | Shiga |
| State/Province: | |
| Postcode: | 525-8577 |
| Country/Region: | Japan |
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