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University of Alberta - NanoFab
The nanoFAB is an open access micro and nano fabrication research facility. With approximately $30,000,000 worth of micro and nano fabrication equipment and infrastructure, our instruments allow for optical mask generation, electron beam lithography, PVD, LPCVD and PECVD deposition of thin films, deep Si etch processes and micro and nano embossing. Along with a dedicated staff of 10 for training and on site technical assistance for process development we are an unparalleled Canadian academic facility for micro and nano fabrication research and development.