The LNF is available, on a fee basis, for use by research groups from government, industry and universities. Equipment and processes are available for research on silicon integrated circuits, MEMS, III-V compound devices, organic devices and nanoimprint technology.
Address: | 1301 Beal Ave |
City: | Ann Arbor |
State/Province: | Michigan |
Postcode: | 48109 |
Country/Region: | USA |