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Virginia Tech - Micro & Nano Fabrication Laboratory
The cleanroom currently houses an array of process tools for the research and development of MEMS, nanotechnology, bio-sensing applications, photonic and microelectronic devices.. Adjacent to the cleanroom, there is another lab which houses and supports several physical vapor deposition and metrology device characterization tools. Inside the clean room there are exhausted process areas for photolithography, development/solvent, and acid/base processing.