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Virginia Tech - Micro & Nano Fabrication Laboratory

The cleanroom currently houses an array of process tools for the research and development of MEMS, nanotechnology, bio-sensing applications, photonic and microelectronic devices.. Adjacent to the cleanroom, there is another lab which houses and supports several physical vapor deposition and metrology device characterization tools. Inside the clean room there are exhausted process areas for photolithography, development/solvent, and acid/base processing.

Address: Bradley Dept of ECE, 302 Whittemore Hall
City: Blacksburg
State/Province: Virginia
Postcode: 24061-0420
Country/Region: USA
 
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