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Posted: Dec 01, 2014

EV Group Establishes Nanoimprint Lithography Competence Center For Photonic Applications

(Nanowerk News) EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that it has established the NILPhotonics™ Competence Center, which is designed to assist customers in leveraging EVG's suite of nanoimprint lithography (NIL) solutions to enable new and enhanced products and applications in the field of photonics. These include light emitting diodes (LEDs) and photovoltaic (PV) cells, where NIL-enabled photonic structures can improve light extraction and light capturing, respectively, as well as laser diodes, where photonic structures enable the tailoring of device characteristics to improve performance. The NILPhotonics Competence Center includes dedicated, global process teams, pilot-line production facilities and services at its state-of-the-art cleanrooms at EVG's headquarters in Austria as well as its subsidiaries in North America and Japan.
"Nanoimprint lithography is an enabling technology for the design and manufacture of all kinds of photonic structures, which can significantly shorten time to market and lower cost of production compared to conventional technologies, such as electron-beam writing and stepper systems for optical lithography," stated Markus Wimplinger, corporate technology development and IP director at EV Group. "For example, compared with conventional lithography, our full-wafer nanoimprinting technology can pattern true three-dimensional structures in the sub-micron to nano-range as well as features as small as 20 nm, which opens up a range of new photonic applications. With our NILPhotonics Competence Center, we're not just providing our customers with the most advanced NIL systems; we're also working closely with them during product development to help them determine how best to optimize their product designs and processes to take advantage of the resolution and cost-of-ownership benefits that NIL brings."
The new NILPhotonics Competence Center builds on more than 15 years of NIL experience at EVG with the largest installed base of NIL systems worldwide. EVG's NIL equipment portfolio includes the recently introduced EVG7200 UV-NIL system, which supports EVG's next-generation SmartNIL™ large-area soft NIL process for high-volume manufacturing. The EVG7200 with SmartNIL provides unmatched throughput and cost-of-ownership advantages over competing NIL approaches. More information can be found at http://www.evgroup.com/en/about/news/2014_10_EVG7200/
About EV Group
EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems. Founded in 1980, EV Group services and supports an elaborate network of global customers and partners all over the world. More information about EVG is available at www.EVGroup.com.
Source: EV Group (press release)
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