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Posted: May 11, 2016

Fast, Extremely Stable, Quiet: Compact Linear Positioning Stage driven by Ultrasonic Piezo Linear Motor

(Nanowerk News) Ultrasonic piezomotors are small and provide motion with high resolution, as well as an extremely wide dynamic range from microns/second to 100s of millimeters/second. A significant advantage over magnetic drive technologies (such as voice-coils, brushless and 3-phase motors, also offered by PI) is the self-locking principle: once the motor reaches a target position, it acts like a ceramic brake and locks the platform into place providing extreme long term stability at zero driving current and heat generation.
Ultrasonic piezomotors
Mobil / Integration: Due to their low power requirements, ultrasonic motors can also be integrated into mobile measuring and medical devices.
Compact and Fast: With the U-521, PI (Physik Instrumente), has now added a compact linear stage to its portfolio with dimensions of 353515mm, similar to the size of a matchbox. The compact design allows easy integration, even when space is limited. In addition to the high speed up to 200 mm/sec, the low inertia (direct drive no rotating parts) allows for a very dynamic start-stop behavior with settling times in the milliseconds.
Watch Video Explaining Drive Principle
Precision Closed-Loop: An integrated optical linear encoder provides position feedback with 100 nanometers resolution. Higher resolution versions are available for OEMs.
Applications: Typical application fields can be found in industry and research, for example, automatic micromanipulation, positioning of samples or when adjusting optical components, such as objectives and camera lenses. Vacuum-compatible versions (to 10-6 hPa) are also available.
Multi-Axis: Two stages can be combined to an XY-setup no need for an adapter plate.
Rotation: The linear stage is complemented by a number of miniaturized closed-loop rotary stages with diameters from 20 to 50mm.
Patented Drive Principle: A compact piezoceramic plate oscillates at 100s of kHz (inaudible to human ears). Each cycle transfers a nanometric displacement onto a ceramic runner coupled to the moving carriage. No energy is consumed at rest, no heat to be dissipated, and the servo jitter is eliminated.
More Information
Standard and Custom
PI has in-house engineered solutions with over 4 decades of experience working with customers to provide products that meet application demands, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the application.
About PI
PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eleven subsidiaries, R&D / engineering on 3 continents and total staff of 850.
Source: PI (press release)
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