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Introductory Guide to Nanometrology

This Guide introduces the reader to the science of measurements at the nanoscale, that is nanometrology. It is aimed at researchers in the nanotechnology area, for whom the metrology aspect is new, and at metrologists, interested in knowing about the specifics of metrology at the nanoscale. The Guide does not give an exhaustive review of the field. Rather it is intended to increase the general awareness of nanometrology, and its basic challenges.

Source: Co-Nanomet
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Introductory Guide to Nanometrology