Universidad Politecnica de Madrid ISOM |
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| The Microsystems and Nanotechnology group deals with Opto- and Electro-mechanical systems, MEMS and MOEMS. Optical detection modulation with piezoelectric devices; Physical, chemical and biological sensors (optical, piezoelectric, electrochemical). Polymer deposition; Nanoparticles, nanostructures and nanodevices; Atomic Force Microscope and Electron Beam Lithography. | |||
| Address: | Institute for Systems based on Optoelectronics and Microtechnology, Ciudad Universitaria | ||
| City: | Madrid | ||
| State/Province: | |||
| Postcode: | 28040 | ||
| Country: | Spain | ||
| (or region if it is a multinational network or initiative) | |||
