TETRA develops, manufactures and distributes systems and components of sensors, robotics and automation. Our product portfolio ranges from highly specialized test and production systems for micro and nano technology to lightweight robotic systems for automation of sensitive production and service processes.
ISOPAD is currently supplying custom design leading edge radiant heaters for use in CVD/PVD vacuum appplications. Customers include the major suppliers of OEM equipment to the Semiconductor, LCD and Photovoltaic industries where close control and reliable solutions for thin and thick film depoition are required.
Vistec Electron Beam GmbH provides leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research as silicon direct write, compound semiconductor, mask making as well as integrated optics and several new emerging markets.
The aim of XTREME technologies is the development, manufacturing, marketing and service of high power EUV sources for lithography and related applications in close cooperation with our parent companies. Extreme Ultra-Violet (EUV) lithography is the technology of choice to meet the needs of semiconductor industry in 2009 and beyond.