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Posted: Nov 18, 2013

Picosun's Fast P-200 Batch ALD Tool Breaks Through Into LEDs And MEMS

(Nanowerk News) Picosun Oy, the leading Atomic Layer Deposition (ALD) equipment manufacturer, announces the launch of the new PICOSUN™ P-200 batch ALD system. The P-200 ALD tool is specifically optimized for fast and efficient manufacturing of MEMS (MicroElectroMechanical Systems, e.g. sensors and actuators), LEDs (Light-Emitting Diodes), and power electronics components.
PICOSUN™ P-200 ALD tool is designed for wafer size 150 mm or 200 mm in batch of 25 wafers. The cornerstones of Picosun ALD system design – unmatched versatility, modularity, and flexibility – are manifested in the variety of automation options available for the P-200 tool: The system can be equipped with a linear inline loader, it can be operated with an industrial robot, connected to a vacuum robot, or integrated with a vacuum load lock, glove box, or mini clean environment. Quick, fully automated batch processing enables high production throughput with proven world-leading process quality and low cost-of-ownership.
PICOSUN™ P-200 ALD system has already been accepted by two production customers for MEMS and the tool has been selected also by two prominent LED manufacturers. With the earlier introduced PICOSUN™ P-300 and P-1000 ALD systems, Picosun now offers a full range of industrial batch production tools to suit every size of wafers and production volumes.
”We are extremely happy to secure our position in the rapidly expanding LED, MEMS, and compound semiconductor market with our new PICOSUN™ P-200 production tool. The compact, small footprint design of the tool, combined with extremely fast batch processing and excellent film quality give us an unrivaled competitive edge“, states Juhana Kostamo, Managing Director of Picosun.
Picosun’s world leading ALD technology enables industrial leap into the future by novel, cutting-edge coating solutions, with four decades of pioneering, groundbreaking expertise in the field. Today, PICOSUN™ ALD systems are in daily production use in numerous prominent industries around the globe. Picosun is based in Finland, it has its subsidiaries in USA and Singapore, and world-wide sales and support network.
Source: Picosun (press release)
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