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Posted: April 16, 2009

Oxford Instruments Announces Multi-System Order From King Abdullah University of Science and Technology

(Nanowerk News) Oxford Instruments has announced a substantial multi-system order from the newly built King Abdullah University of Science and Technology (KAUST) in Saudi Arabia. This large order comprises multiple plasma etch, deposition and growth systems.
These tools will equip the Nanofabrication Core research facility, and include key Oxford Instruments Plasma Technology (OIPT) systems including several PlasmalabSystem100 tools for RIE and ICP etch, and PECVD; and a FlexAL atomic layer deposition tool.
Oxford Instruments has extensive experience in supplying multi-system installations to both the academic and industrial sectors, a key recent example being Southampton University, UK where OIPT has recently installed a number of its tools in its new cleanroom research facility.
Dr. Mohamed Samaha, VP Research Development at KAUST, comments, "This equipment is for our Nanofabrication Core Lab, and comprises tools for nano-material fabrication incorporating etching, deposition and growth. These will make our core labs among the most advanced in the world. Researchers at KAUST will be able to utilize these tools in the clean room for the manufacture of nano-materials to advance the research agenda at KAUST."
Mark Vosloo, Sales Director for OIPT is delighted with the order, "This significant order from a major Middle Eastern facility with a strong commitment to nanofabrication research is clearly excellent business for OIPT. We are confident this is the start of a long relationship, and are delighted to be involved at the inception of KAUST University."
Source: Oxford Instruments (press release)
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