The latest news from academia, regulators
research labs and other things of interest
Posted: April 21, 2009
Georgia Institute of Technology Orders Black Magic Plasma Enhanced CVD system from AIXTRON
(Nanowerk News) AIXTRON AG announced the receipt of a purchase order for a 4” Black Magic PECVD for carbon nanotube (CNT) growth from The Georgia Institute of
Technology (GaTech) in Atlanta, GA, USA within the first quarter 2009.
This combined thermal CVD and plasma enhanced CVD tool is planned to be delivered in
second quarter 2009. The NEST (Nanoengineered Systems and Transport) Research Group
will use the system to process CNTs for CPU thermal management and for electrode
materials in electrochemical energy conversion systems. The excellent thermal, electrical,
and mechanical properties of CNTs offer great advances to the performance of these
The AIXTRON system uses unique rapid heating and plasma technologies which have been
proven in the field since 2005, and has enabled customers to produce various types of
nanotubes, including low temperature, multiwall, single-wall and super-growth nanotubes.
This system will be one of the first installed in the 30,000 SF clean room in the Marcus
Nanotechnology Building at Georgia Tech, and will be used widely by several research
groups at Tech.
Prof. Baratunde Cola, one of the participating faculty members in the program, states: "We
like the Black Magic tool because it is easy to use and delivers proven technology that has
been implemented at lab and industrial scales. These features accelerate the learning curve
for CNT growth and will facilitate the transfer of CNT-based technologies under development
at Georgia Tech to commercial products."
AIXTRON is a world leading supplier of Chemical Vapor Deposition (CVD), Atomic Vapor
Deposition (AVD®) and Atomic Layer Deposition (ALD) equipment to the semiconductor
industry, with over 1,500 systems delivered to date. AIXTRON-Nanoinstruments is focused
on serving the Nanotechnology market through the manufacture of plasma enhanced CVD
systems for carbon nanotubes (CNT) and other nanomaterials. AIXTRON’s nanotube and
nanowire track record includes customers such as Chalmers University of Technology, El-
Mul Technologies, Harvard University, Kansas State University, Massachusetts Institute of
Technology, Nanoconduction, Portland State University, Singapore Polytechnic, Santa Clara
University, UC San Diego, University of Tuebingen, and Yale University