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Posted: July 14, 2009

New MaskTrack Pro System Delivers Technology for Next Generation Lithography

(Nanowerk News) HamaTech Advanced Process Equipment (APE) GmbH & Co. KG, today announced its most advanced photomask processing system, the MaskTrack Pro®, which extends the technology of HamaTech’s highly successful MaskTrack System to Next Generation Lithography applications; 193i 22nm half pitch (hp), Extreme Ultraviolet Lithography (EUVL) and Nano-Imprint Lithography (NIL). Key to MaskTrack Pro is state-of–the-art cleaning technology that delivers unmatched particle removal down to 20nm while protecting 100% of the vulnerable mask structures and materials.
“Without the mask the lithography process cannot begin and without a pristine, defect-free mask at the point-of-exposure the probability of yield loss on Next Generation Lithography processes is a fact” said Wilma Koolen-Hermkens, Chief Executive Officer of HamaTech APE “Mask Track Pro is the first system in the industry that can fully address zero particle and defect tolerance levels on the mask prior to exposure. We are encouraged by the positive response received from Semiconductor IDM’s and OEM’s that require the capabilities of the MaskTrack Pro to eliminate a key barrier of entry for new Lithography methods.”
MaskTrack Pro combines innovative cleaning technology with sophisticated platform design for a mask integrity system ready to meet the production challenges of 193i 22nm hp DPT, EUVL and NIL. A unique combination of physical and chemical cleaning technologies enables customers to effectively remove organic and inorganic contamination without damage to the vulnerable features and material structures of the reticle. Focused Spot Cleaning TM, a feature for the precise removal of particles in defined areas of the mask, saves significant time after repair and eliminates the toughest overlay issues caused by backside contamination. The new MaskTrack Pro design allows clustering of metrology systems and pod-in-pod stocking for a holistic mask management approach throughout the life of the mask. MaskTrack Pro’s distinctive approach to mask integrity ensures that the mask is defect-free at exposure, offering customers a dramatic increase in tool productivity and uptime.
Over 500 HamaTech systems, including MaskTrack, have been shipped to semiconductor manufacturers and mask shops worldwide. For the last 20 years, HamaTech cleaning innovation has been used to enable the photolithography processing at every advanced technology node. Please visit us at Semicon West 2009 July 14-16th at the Moscone Center in San Francisco, California. We will be located in booth number 1707.
About HamaTech APE
HamaTech is an established leader of semiconductor equipment. At HamaTech we combine the latest technology with extensive know-how to provide systems that are future-compliant. HamaTech APE GmbH & Co. KG is a wholly-owned subsidiary of SINGULS TECHNOLOGIES AG, Kahl/Main.
Short profile SINGULUS TECHNOLOGIES
SINGULUS TECHNOLOGIES, the world leader in High Volume Manufacturing equipment for Optical Discs CD/DVD/Blu-ray, acquired STANGL to focus on the photovoltaic market and successfully entered the solar equipment market. The new business area “Solar” will be expanded in the next years.
While STANGL specializes in wet-chemical processes, SINGULUS’ core competence is physical coating and atomization technology. SINGULUS’ extensive know-how forms the optimum base for development of highly cost-efficient and fully-automated production lines.
Through its daughter company HamaTech APE GmbH & Co. KG the Semiconductor and Magnetic Storage Industries are served. For well over 20 years, HamaTech APE is the acknowledged world market leader for Photomask cleaning, bake and develop.
Source: HamaTech (press release)
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