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Posted: September 1, 2009

Surface Technology Systems Receives Order from ISSYS for MEMS Fabrication

(Nanowerk News) Surface Technology Systems plc (STS), a leader in plasma process technologies for manufacturing micro electromechanical systems (MEMS) and advanced semiconductor devices, today announced that they have sold a Pegasus DRIE system to Integrated Sensing Systems.
ISSYS was established in 1995 to design, develop, manufacture and commercialize innovative products based on high performance MEMS. Nader Najafi, founder of ISSYS stated, "As our technology has matured, we have succeeded in developing micro devices for industrial, medical, and fuel cell applications. For many years, STS silicon etch technology has been a key enabling process for our research and development, and this Pegasus tool will provide us with the manufacturing capability we now require as we ramp up production. The tool will also allow us to offer high-volume manufacturing to our MEMS foundry customers."
Eizo Yasui, CEO of STS replied, "This order is yet another example of how STS' long-term relationships with research groups and small start-ups can enable a smooth transition to MEMS production when innovations developed in the lab are eventually brought to market."
About Surface Technology Systems plc
STS, a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non 'mainstream' semiconductor devices. STS serves a range of applications in several sectors within the telecommunications, data storage, advanced packaging, MEMS and Nanotechnology.
STS is the market leader in deep silicon etching for the growing advanced packaging and MEMS market, where it offers patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The Group currently markets in over 30 countries and has an installed base of over 950 systems.
About Integrated Sensing Systems (ISSYS)
ISSYS is a leader in advanced MEMS technologies for industrial, medical devices, microfluidic and scientific analytical sensing applications. Founded in 1995, ISSYS is one of the oldest independent MEMS companies in the US. ISSYS operates a "full manufacturing under one roof," multi-million-dollar, state-of-the-art MEMS fabrication facility located near Ann Arbor, Michigan. An ISO 9001:2000 certified and ISO 13485:2003 (medical device manufacturing) qualified organization, ISSYS is a vertically integrated company dedicated to developing and manufacturing system-level products based on MEMS technology (MEMS Inside).
Source: STS (press release)
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