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Posted: September 29, 2009

Oerlikon Systems: Booming Sales for CLUSTERLINE Cluster Tool

(Nanowerk News) Oerlikon Systems, a leading supplier of PVD sputter systems, is a notable benefactor in the emerging revival of the semiconductor industry. During this current quarter, key semiconductor manufacturers in Taiwan, and South East Asia have placed orders for numerous 300mm ClusterLine PVD sputter tools aimed at the packaging market.
“Over the past year we’re enjoyed a consistently high level of interest in the CLUSTERLINE from many manufacturers around the world,” explains Andreas Dill, Head of Oerlikon Systems. “And the strong wave of firm orders confirm that we have the right production solutions for the next generation of products and also that our industry is showing robust signs of activity.”
The CLUSTERLINE 300 cluster tool platform is specifically designed for advanced packaging and backside metallization applications for wafer sizes up to 300mm. The newest orders placed with Oerlikon Systems - by leading packaging clients in Asia - are for systems configured for the production of advanced MEMS, power ICs and optoelectronic devices. Three of the four clients are established Oerlikon accounts and the forth client, a first-time customer, put in an order following a competitive head to head selection process.
“For years, we have focused our efforts in the development and optimization of innovative production solutions for under bump metallization (UBM), redistribution layers, backside metallization and ultra thin wafer processing,” adds Dill. “Our continuous process improvement in this 3rd generation cluster tool has resulted in a reliable and highly flexible platform with outstanding cost efficiency - with the remarkably high wafer yields and easy operation.”
Oerlikon – Enabling High Technology
Oerlikon is one of the world's leading international high-tech industrial groups specializing in machine and plant engineering. The company is a leader in the field of industrial solutions and innovative technologies for textile manufacture, thin-film solar and thin-film coating, drive, precision and vacuum systems. With roots in Switzerland and a long tradition stretching back 100 years, Oerlikon is a global player with a workforce of more than 16000 at 158 locations in 37 different countries. The company's sales amounted to CHF 4.8 billion in 2008 and it ranks either first or second in the respective global markets.
Source: Oerlikon Systems (press release)
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