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Posted: December 11, 2009

New Pegasus300 Sold to Leading French Research Institute for CMOS Packaging

(Nanowerk News) SPP Process Technology Systems (SPTS) and its parent company Sumitomo Precision Products Co., Ltd (SPP), leaders in plasma process technologies for manufacturing micro-electro mechanical systems (MEMS) and advanced semiconductor devices, today announced that they have sold their 300mm-compatible DRIE production tool to CEA-LETI in France. Named the "Pegasus300", this latest tool is a natural evolution of the well-established 200mm "Pegasus" system, designed to address the needs of IC manufacturers. It will be used for etching through silicon vias (TSVs) as part of LETI's 300mm CMOS line. Also included in this sale is a 200mm Pegasus system for LETI's MEMS200 line.
Claude Massit, VP Heterogeneous Integration on Silicon at CEA-LETI, explained, "Throughout the highly competitive tender process we were impressed with the excellent process results and established European service infrastructure provided by SPTS, backed-up with the financial strength, focus and strategy of SPP and a new state-of-the-art Japanese manufacturing plant, where this tool was constructed. We consider SPTS/SPP as a major partner in DRIE with these 2 tools."
Susumu Kaminaga, President of SPP and Chairman of SPTS replied, "SPP and SPTS are extremely pleased to be installing our Pegasus300 at such an important European research facility. By working closely together we have developed world-beating technology and can provide innovative equipment of the highest standard to our worldwide customer base."
About SPP Process Technology Systems Limited
SPP Process Technology Systems was established in October 2009 as the vehicle for the merger of Surface Technology Systems and Aviza Technology. The new company is a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd, and designs, manufactures, sells and supports advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets. These products are used in a variety of market segments, including data storage, MEMS and nanotechnology, advanced 3-D packaging, and power integrated circuits for communications.
About Sumitomo Precision Products Co., Ltd
Sumitomo Precision Products Co., Ltd, headquartered in Amagasaki (Japan), have, over the past 90 years, expanded from their core field of aerospace products into such diverse areas as heat-exchangers and heat-control systems, industrial machinery employing hydraulic control, equipment for semiconductor and flat panel display production, ozone generators for protecting the environment and their unique motion sensors.
About CEA/Leti
CEA is a French public research and technology organization, with activities in three main areas: Energy, Technologies for Information and Healthcare, and Defense and Security. Within CEA, the Laboratory for Electronics & Information Technology (Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and Microsystems (MEMS) are at the core of its activities. As a major player in MINATEC excellence centre, Leti operates 8,000 m(2) state-of-the-art clean rooms, on 24/7 mode, on 200 mm and 300 mm wafer standards. With 1,200 employees, Leti trains more than 150 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, Leti puts a strong emphasis on Intellectual Property and owns more than 1,400 patent families. In 2008, contractual income covered more than 75% of its budget worth 205 M EUR.
Source: SPP Process Technology Systems (press release)

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