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Posted: December 14, 2009
Vistec Enters Into Electron-Beam Lithograpy Project With Moscow University
(Nanowerk News) Vistec Electron Beam
GmbH has announced that it has entered into a joined electron-beam
lithography project with the renowned Moscow Institute of Electronic
Technology (MIET). MIET, one of the most advanced Universities and research
institutions in Russia and Vistec Electron Beam, a leading German supplier
of electron-beam lithography systems will collaborate within a dedicated
photomask manufacturing project recently kicked-off in Russia.
"After ramping up, the MIET Photomask Centre will provide both semiconductor
industry as well as research institutes in Russia with advanced photomasks
for a wide range of applications", said Vladimir Bespalov, Senior Vice
Rector of MIET Technical University. "Besides mask manufacturing, education
and research will play a central role in the new Photomask Centre. MIET
selected a Variable Shaped Beam system from Vistec because of the
lithography performance, high flexibility, field proven reliability and ease
of operation functionality of the system."
The 50kV Variable Shaped Beam system from Vistec is equipped with a fully
automated substrate handling and is prepared to expose different substrate
types and sizes.
"We are extremely proud to team-up with MIET in this photomask manufacturing
project", stated Wolfgang Dorl, General Manager of Vistec Electron Beam
GmbH. "The recently shipped Variable Shaped Beam system represents a
continuation of an outstanding business history the company has with Russia
and opens up new and exciting opportunities in the growing Russian market."
The Moscow Institute of Electronic Technology (MIET, Technical University)
was established in Zelenograd, the center of Russian microelectronics, in
Today MIET is an advanced Russian university which is training
highly-qualified professionals in the most popular fields of electronics and
IT. The university covers 9 faculties, 32 fundamental and 17 basic
professorial chairs (institutions in hi-tech companies) providing excellent
training and allowing their students and graduates to continue their
academic education. All in all a staff of 650 scientific-educational
personnel, among the MIET tutors and employees are 3 members of the Russian
Academy of Science , 3 universal graduates, 95 professors, doctors and 290
PhDs, are teaching 6500 students, more than 300 of them are aspirants and
MIET proved its status of a leading university in Russia by being listed in
2006 as one of the first 17 winners of the national priority project
"Education". Now MIET is among the universities promoting best innovative
educational programs for further development of the training system.
About Vistec Electron Beam Lithography Group
The Vistec Electron Beam Lithography Group is a global manufacturer and
supplier of electron-beam lithography systems with applications ranging from
nano and bio-technology to photonics and industrial environments like mask
making or direct writing for fast prototype development and design
evaluation. The Vistec Electron Beam Lithography Group combines Vistec
Electron Beam and Vistec Lithography.
About Vistec Lithography
Vistec Lithography develops, manufactures, and sells electron-beam
lithography equipment based on Gaussian Beam technology. Their electron-beam
systems are world-wide accepted in advanced research laboratories and
universities. The company is located in Watervliet, NY (USA), within the
Capital Region of New York.
About Vistec Electron Beam
Vistec Electron Beam is providing electron-beam lithography equipment based
on Shaped Beam technology, which is used by leading semiconductor
manufacturers and many research institutes around the world. Their
innovative electron-beam systems are used for microchip production and
integrated optics as well as for scientific and commercial research. The
company is located in Jena (Germany).