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Posted: February 18, 2010
LED Illuminator from Energetiq Technology Provides Low COO for Lithographic Applications
(Nanowerk News) Energetiq Technology, Inc., a developer and manufacturer of specialized light sources for advanced technology applications, has announced a solid-state LED Illuminator to its light source product offering for use in semiconductor lithography. The Energetiq LED Illuminator will be introduced at SPIE Advanced Lithography, February 23-24, 2010 in San Jose, CA.
The Energetiq LED Illuminator has a long operating life -- up to 20,000 hours -- so there are no bulb changes and subsequent system downtime as can occur with the use of traditional mercury lamps. It offers exceptional uniformity of illumination, typically less than 2% of non-uniformity -- no need for an additional homogenizer. In addition, the instant on/off capability of the LED Illuminator allows for operation without a shutter.
"Historically, UV LEDs have not been considered practical as illumination sources because of their low power and brightness," said Paul Blackborow, CEO of Energetiq. "Our expertise in high brightness, high output light sources has enabled us to create an LED illuminator that can produce the brightness and power needed for today's lithographic applications, with significant advantages over mercury lamps. Cost of ownership is greatly decreased due to the long life of our lamp. The superior uniformity control and no warm-up benefits of the LED Illuminator provide our customers with enhanced performance opportunities. Our proprietary light engine and sophisticated cooling technique leads to a very compact design which can eliminate the need for mechanical shutters, filters and costly optics, thereby reducing system complexity and tool footprint."
The Energetiq LED Illuminator is available in a choice of 365nm (i-line) or 365/405/440nm (i/h/g-line) versions and can be integrated into new or retrofitted tools.
Energetiq Technology, Inc. is a developer and manufacturer of advanced light sources that enable the manufacture and analysis of nano-scale structures and products. Used in complex scientific and engineering applications such as analytical instruments for life sciences and leading edge semiconductor manufacture, Energetiq's light products are based on new technology that generates high brightness across the spectrum, from 1nm to 1000nm and beyond, with high reliability, long operating life, and in a compact package.