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Posted: March 2, 2010

Tegal to Present at the Chiba University Fourth International Symposium on Acoustic Wave Devices

(Nanowerk News) Tegal Corporation, an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, will present an invited paper on a “New Generation of S-Gun Magnetron for AlN Reactive Sputtering” at the Chiba University Fourth International Symposium on Acoustic Wave Devices. This prestigious symposium, organized by Professor Ken-ya Hashimoto, IEEE Fellow and Professor of Electronics and Mechanical Engineering at Chiba University, Chiba, Japan, will be held from Wednesday 03 March 2010 through Friday 05 March 2010. Dr. Valery Felmetsger, Tegal’s PVD Process Development Manager, is scheduled to speak on Thursday 04 March 2010 at 3:15pm.
Aluminum nitride, in addition to its essential role in the electro-acoustic filter (FBAR and BAW devices) space, is seeing growing use in the precision timing market. Silicon and AlN MEMS-based timing and frequency control devices are making significant inroads into the high-precision timing markets currently served by products based on quartz crystal oscillators. Important industrial and consumer applications for precision timing devices include Global Positioning System navigation units, smartphones and other wireless communication products, cameras, watches and portable media players. Silicon MEMS timing devices, including those incorporating piezoelectric AlN films, are displacing quartz timing devices as a result of the demonstrated ruggedness of the silicon MEMS timing devices in rough-and-tumble applications, and because of their lower cost.
Tegal Corporation supplies silicon DRIE tools and AlN PVD tools to the electro-acoustic filter and precision timing markets for basic research purposes, for process and product development, and for mass production. Along with providing AlN PVD equipment under the Tegal SMT and Tegal Endeavor product families, Tegal also supports the AlN community by offering high-quality AlN foundry services in its Petaluma, CA PVD Demonstration Laboratory.
About Tegal Corporation
Tegal is an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices found in products like smart phones, networking gear, solid-state lighting, and digital imaging. The Company’s plasma etch and deposition tools enable sophisticated manufacturing techniques, such as 3D interconnect structures formed by intricate silicon etch, also known as Deep Reactive Ion Etching (DRIE). Tegal combines proven expertise with practical system strategies to deliver application-specific solutions that are robust and reliable, and deliver exceptional process quality and high yields at a lower overall cost of ownership. Headquartered in Petaluma, California, the company has more than 35 years of expertise and innovation in specialized technologies, over 100 patents, and an installed base of more than 1900 systems worldwide.
Source: Tegal (press release)
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