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Posted: June 9, 2010
Leading Semiconductor Equipment Manufacturer Selects Crossing Automation's Spartan EFEM for Second Generation Metrology Tool
(Nanowerk News) Crossing Automation, Inc., a leading
supplier of efficient, cost-effective front-end and back-end automation solutions and engineering
services to high volume semiconductor equipment manufacturers, today announced that its
Spartan™ equipment front end module (EFEM) has been selected by a leading manufacturer of
lithography and metrology equipment for its second-generation metrology tool.
The Spartan EFEM was selected because of Crossing's ability to customize the tool to meet the
customer's specific requirements, the ease of software integration with its metrology platform as
well as Crossing's ability to provide its ExpressSolutions™ engineering support to significantly
reduce time to market. The order represents a new customer win for Crossing from a Tier-1
original equipment manufacturer (OEM) for its atmospheric wafer-handling technology.
"This design win strongly validates the technical merits of the Spartan as well as our commitment
to OEMs through the service and support capability we deliver with every tool," said May Su, vice
president of product marketing for Crossing Automation. "Our ability to work with this customer
to design and deliver customized interfaces significantly facilitated integration with its process and
metrology modules, while the Spartan's demonstrated performance benefits met the stringent
requirements of the broader lithography process."
With the Spartan, Crossing is able to deliver complete EFEM solutions with a simple, unified design
that enables higher throughput, higher particle performance, optimized cleanroom space and
lower cost of ownership. A key feature that contributed to the Spartan's selection is its advanced
passive backside contact (PBC) end effector design, which eliminates particles from edge contacts
and minimizes backside particles through use of specialized polymer pads. The precision and
reliability of its Wafer Engine™ robot offers an additional competitive advantage for the Spartan.
About Crossing Automation
Crossing Automation is a leading supplier of efficient, cost-effective front-end and back-end
automation solutions and engineering services to high volume semiconductor equipment
manufacturers. The company's unique approach to automation solutions enables its customers to
shorten time to market, lower development costs and reduce total costs. Through its front-end
and back-end automation solutions, Crossing achieves critical manufacturing flexibility for OEMs
and IC manufacturers alike.
Crossing's End-to-End Automation Platforms
Crossing Automation's ExpressConnect™ modular building block family of automation
components delivers integrated atmospheric and vacuum substrate handling sub-systems with
small footprints, low costs and high productivity for semiconductor manufacturing. Crossing also
delivers a broad range of leading-edge, cost-effective 300 mm, 200 mm, and 150 mm component
technologies to both OEMs and semiconductor manufacturers including isolation, robotics, and
tracking. Crossing implements a system architecture that uses highly reliable linear transfer
devices and simplified control algorithms to improve efficiencies and control reliability and is key
to enabling a comprehensive, flexible, end-to-end automation solution.