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Posted: August 4, 2010

In-Situ XRF Yield Management Tool for CIGS Composition and Thickness Measurement

(Nanowerk News) Solar Metrology, a global provider of X-Ray Fluorescence (XRF) analysis tools, expands its SMX XRF tool portfolio for film composition and thickness measurement of CIGS photovoltaic depositions with the addition of the System SMX- LINEAR ISI.
Solar Metrology's System SMX-Linear ISI is in-situ x-ray fluorescence (XRF) metrology tool platform that provides Cross Web or cross panel gradient measurement of CIGS composition and thickness measurements for thin film solar PV metal film stacks on flexible roll to roll substrates such as stainless steel, aluminum and polyimide or rigid substrates such as float glass.
roller painted solar cell
Typical measurement applications include Mo thickness and all CIGS combinations (including all CIG alloys and/or film combinations and final CIGS formulations).
SMX LINEAR ISI is fast, flexible and easily integrated into any vacuum deposition tool or vacuum process station or point of a vacuum process line.
SMX LINEAR ISI utilizes X-ray fluorescence, an enabling technology for CIGS manufacture, that delivers yield management and yield improvement by allowing in-situ process control. The SMX LINEAR ISI tool Platform does not affect the deposition process since all SMX LINEAR ISI tool components reside outside of vacuum for optimum performance and serviceability.
Solar Metrology's SMX Measurement tool platform provides a production-ready suite of film thickness and composition measurement tools for research and process development, in-process monitoring and post-process quality control. Solar Metrology is the global leader in the development and manufacture of high-performance X-Ray Fluorescence (XRF) analysis tools, specifically engineered to meet the demanding thin film measurement requirements of the solar electric and renewable power industries.
Source: Solar Metrology (press release)
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