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Posted: August 25, 2010

JEOL Scanning Electron Microscope Offers Versatile Through-the-Lens System for Ultrahigh Resolution

(Nanowerk News) JEOL has introduced a unique Scanning Electron Microscope with optics that enable ultrahigh resolution imaging at low kV and high spatial resolution microanalysis. The Through-the-Lens System (TTLS) combines new objective lens and detector technologies with the proven JEOL in-lens Field Emission Gun. The TTLS is designed to enable imaging of a wide variety of samples, including magnetic materials. The model JSM-7001FTTLS LV also features low vacuum operation and a large specimen exchange airlock.
The JEOL JSM-7001FTTLS LV
The JEOL JSM-7001FTTLS LV.
In the TTL System, in-lens detectors with energy filtering provide both topography (SE) and Z contrast (BSE) images. Short working distance, low currents, and low kV sensitivity ensure high resolution BSE images. Gentle Beam technology reduces charging and improves resolution, signal-to-noise, and beam brightness, especially at low beam voltages (down to 100V). The TTLS operates at low magnification (10X) with no distortion of the image or the EBSD pattern, allowing collection of large area EBSD maps of large grain materials.
The flexibility of this SEM is displayed in its ability to run in low vacuum (LV) mode for imaging nonconductive samples at high kV and beam currents for a variety of analytical applications that include analysis with EDS, WDS, EBSD, and CL. An optional STEM detector allows imaging of thin samples with sub 0.8nm resolution.
About JEOL USA, Inc.
JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.
JEOL USA, Inc., a wholly owned subsidiary of JEOL, Ltd., Japan, was incorporated in the United States in 1962. The company has 13 regional service centers that offer unlimited emergency service and support in the U.S.
Source: JEOL (press release)
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