First Single-port EpiCurveTT for Showerhead Reactors Installed at Fraunhofer Institute
(Nanowerk News) LayTec is happy to announce
a successful installation of
EpiCurveŽTT on an Aixtron
Close Coupled Showerhead
Ž (CCS) MOCVD system
at Fraunhofer Institute for
Applied Solid State Physics
(IAF) in Freiburg, Germany.
For the first time an
EpiCurveŽTT was installed
on a showerhead system on only one viewport! In the past, since the viewports of such
systems are so small, we used 2 separate windows: one for
curvature and one for temperature and reflectance measurements.
Now, due to the improved design, all three parameters
are measured through one standard AIX CCS viewport.
Dr. Chunyu Wang and his team at IAF will use the tool for
growth control of GaN on silicon substrates. The simultaneous
in-situ monitoring of wafer temperature, reflectance
and curvature will be used to engineer the stress in the epilayers.
Dr. Wang commented: "The new sensor will help us to
get flat and crack-free GaN layers on Si substrates for future
sophisticated electronic devices."
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