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Posted: September 7, 2010

EpiCurveTT AR for Advanced Curvature Resolution in Planetary Reactors

(Nanowerk News) Recently, LayTec launched EpiCurveŽTT AR (advanced resolution) for measurements of the aspherical curvature component during epitaxial growth.
The tool is the perfect solution for PlanetaryŽ and other gas-foil rotation MOCVD systems where the azimuth of the rotating wafers is unknown. The standard EpiCurveŽTT without AR measures randomly either along the major axis (larger bow - blue arrow in Fig. 1) or along the minor axis (smaller bow - red arrow in Fig. 1). In a PlanetaryŽ reactor the phase of rotation is unknown. As a result, the signal looks "noisy" (red line in Fig. 2): it oscilates between the maximum and the minimum of the azimuthal aspherical bow.
Schematic, fabrication, and structure of the membrane based electrode for active electrical bacteria killing Fig. 1: measurement principle with a 1-dimensional detection system (EpiCurveŽTT without advanced resolution)
Fig. 2: Curvature measurements with conventional EpiCurveŽTT (red) and EpiCurveŽTT AR (black): the new tool eliminates the aspherical distortion in the signal.
The new AR tool measures curvature along two perpendicular axes and eliminates 2nd order azimuthal bowing effects.
In Fig. 2, the black line shows the curvature signal of the new EpiCurveŽTT AR sensor. The signal-to-noise ratio of the tool with advanced resolution improves the curvature signal from ą8 km-1 (red line) to ą 0.2 km-1 (black line) and measures only the main curvature component by eliminating the aspherical contribution.
Even the quantity of asphericity can be extracted by analysis of the advanced resolution signal. For further information please ask us for the new application note about EpiCurveŽTT AR.
Source: LayTec (press release)
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