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Posted: Sep 20, 2010
Vistec sells Electron-Beam Lithography Technology to AMO GmbH
(Nanowerk News) Vistec Lithography, Inc., a leading supplier of advanced electron-beam lithography systems, announced today that AMO GmbH, a research service provider for nanotechnology located in Aachen (Germany), has placed an order
for Vistec's electron-beam lithography system EBPG5200.
AMO (Gesellschaft für Angewandte Mikro- und Optoelektronik mbH) as a
research service provider holds designated competencies in several areas of
nanotechnology as nanofabrication, nanoelectronics, nanophotonics and
biotechnology. Beside research & development capacity AMO is able to offer
the entire infrastructure required for nanotechnology, in which
electron-beam lithography plays a decisive role. With the new Vistec
EBPG5200 a highly flexible and reliable patterning system will be available
for nanofabrication services.
The Vistec EBPG5200 is the latest version of the highly successive and
field-proven EBPG electron-beam lithography tool series. The EBPG5200 system
can be operated with 20, 50 and 100kV accelerating voltage and is equipped
with a 50MHz pattern generator and full 20bit address technology. With the
EBPG5200 Vistec offers true 100kV/ 1mm performance under regular
Thanks to further enhancements in resolution, noise reduction and beam
stability, the Vistec EBPG5200 is set to routinely generate structures less
than 8nm on varying substrates sizes from piece parts of a few millimetres
to full patterning across a 200mm diameter. The system incorporates an
interactive graphical user interface (GUI) that provides ease of use for
diverse "multi user environments".
Dr. Christian Moormann, Managing Director of AMO GmbH, stated: "High end
electron beam lithography is the basic technology for all our activities in
nanophotonics, electronics and nanoimprint. We decided to base our flexible
nanotechnology R&D services again upon a Vistec electron beam lithography
system because performance and service were convincing. We believe in the
high quality of EPBG5200 even in rugged environmental situations and enlarge
our capabilities significantly with the new system."
Commenting on today's announcement, Rainer Schmid, General Manager at Vistec
Lithography, Inc. noted: "With the EBPG5200 at AMO a long lasting and
fruitful collaboration between the two companies further continues.
Customers like AMO help us to supply systems, which fit best to the
challenging requirements of nanopatterning today and in future."
AMO GmbH is a global acting research company identifying potentials of
nanofabrication for industrial processes in information technology, bio
technology and photonics. Key assets are nanofabrication technology
solutions to realise new electronic and photonic devices from development to
prototype or small volume manufacturing level. Based on a high level
research staff with expertise in CMOS process technology AMO provides
leading edge R&D infrastructure and offers consulting, prototyping and
production of nanostructures for researchers, SMEs up to large scale
Vistec Electron Beam Lithography Group
The Vistec Electron Beam Lithography Group is a global manufacturer and
supplier of electron-beam lithography systems with applications ranging from
nano and bio-technology to photonics and industrial environments like mask
making or direct writing for fast prototype development and design
evaluation. The Vistec Electron Beam Lithography Group combines Vistec
Electron Beam and Vistec Lithography.
Vistec Lithography develops, manufactures, and sells electron-beam
lithography equipment based on Gaussian Beam technology. Their electron-beam
systems are world-wide accepted in advanced research laboratories and
universities. The company is located in Watervliet, NY (USA), within the
Capital Region of New York.
Vistec Electron Beam
Vistec Electron Beam is providing electron-beam lithography equipment based
on Shaped Beam technology, which is used by leading semiconductor
manufacturers and many research institutes around the world. Their
innovative electron-beam systems are used for microchip production and
integrated optics as well as for scientific and commercial research. The
company is located in Jena (Germany).