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Posted: Jan 26, 2011

Sabanci University in Istanbul Orders Electron-beam Lithography System From Vistec

(Nanowerk News) Vistec Lithography Inc.(http://www.vistec-semi.com) is pleased to announce that is has received an order from Turkey for one of its electron-beam lithography systems. The global supplier of advanced electron-beam lithography systems will deliver an EBPG5000plusES to the newly formed Nanotechnology and Application Center (SUNAC) of the Sabanci University based in Istanbul. The Gaussian Beam system fulfils the challenging requirements of the institute which will collaborate in the field of nanotechnology research with other institutions.
"The EBPG5000plusES is a 100kV high performance system, which is state of the art. It will enable us to address the nanotechnology development needs of natural sciences, applied sciences and engineering programs", says Dr. Volkan Özgüz, Director of the Nanotechnology and Application Center. "Due to its flexibility and advantages, the EBPG5000plusES is a perfect investment for the future and will help to establish SUNAC as one of Turkeys leading nanotechnology institution."
Vistec's EBPG5000plusES are dedicated electron-beam lithography systems, which have been developed to meet the diverse requirements for advanced nano-lithography applications in direct write for both R&D and production of GaAs devices. It enables a rapid exposure with a 25MHz rate and a minimum feature size of less than 8nm. The EBPG5000plusES system is capable to expose various substrate types including masks and dimensions up to 150mm size.
Vistec is pleased to have received its first order from a Turkish university. "Due to their flexibility and the multi user environment, our systems are a perfect match to the needs of universities or industry research institutions. After selling a number electron-beam lithography systems to international well-known institutes in the last year, we are highly motivated to continue this positive development in the upcoming year", says Rainer Schmid, General Manager at Vistec Lithography Inc.
Sabanci University
Sabanci University is a private university with a state of the art campus spread over 1,260,000 m2 and located 40 km from Istanbul's city center, in Turkey. Sabanci University has adopted the motto of "creating and developing together". This vision is reflected throughout the entire University, from its interdisciplinary academic programs, its state-of-the-art technology and infrastructure and its research and development projects in industry. Through the implementation of its inventive faculty programs and the establishment of close links with the State, business community, NGOs and other institutions of higher learning, Sabanci University has fostered an environment conducive to research. It has the distinction of being the first university in Turkey accepted for membership in the European Foundation for Quality Management (EFQM). www.sabanciuniv.edu
Vistec Electron Beam Lithography Group
The Vistec Electron Beam Lithography Group is a global manufacturer and supplier of electron-beam lithography systems with applications ranging from nano and bio-technology to photonics and industrial environments like mask making or direct writing for fast prototype development and design evaluation. The Vistec Electron Beam Lithography Group combines Vistec Electron Beam and Vistec Lithography.
Vistec Lithography
Vistec Lithography develops, manufactures, and sells electron-beam lithography equipment based on Gaussian Beam technology. Their electron-beam systems are world-wide accepted in advanced research laboratories and universities. The company is located in Watervliet, NY (USA), within the Capital Region of New York.
Vistec Electron Beam
Vistec Electron Beam is providing electron-beam lithography equipment based on Shaped Beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world. Their innovative electron-beam systems are used for microchip production and integrated optics as well as for scientific and commercial research. The company is located in Jena (Germany).
Source: Vistec (press release)
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