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Posted: Mar 10, 2011

Carl Zeiss System PROVE passed Final Acceptance at NuFlare Technology

(Nanowerk News) PROVE™ enables NuFlare to calibrate and qualify their e-beam mask writers at a technologically advanced level. The calibration via a registration system is a critical step in the manufacturing of e-beam writers and essential for their performance. "The Carl Zeiss system is state-of-the-art and has the resolution capabilities we require. The high accuracy and unprecedented measurement possibilities of PROVE are crucial for development and optimization of our latest generation e-beam mask writers. Having this new system in operation we will be able to extend our lead towards the competitors" states Mr. Fumiaki Shigemitsu, Director of NuFlare Technology.
The Final Acceptance attests Carl Zeiss that PROVE™ is suitable for production and confirms the technology and market success of this newly developed product line. "This initial Final Acceptance at a customer site is an important milestone and further demonstrates the maturity of PROVE™. Its leading edge pattern placement metrology capabilities will enable our customers to realize their current and future metrology needs. A further series of PROVE installations and deliveries is currently proceeding." explains Dr. Oliver Kienzle, Managing Director of Carl Zeiss Semiconductor Metrology Systems Division.
PROVE™ is designed to measure image placement and critical dimension on photomasks with sub-nanometer repeatability and accuracy. Through its superior 193nm optics the system offers higher resolution that will enable the EUV mask roadmap. It was collaboratively developed within three years by the Semiconductor Metrology Systems Division in Jena/Germany, and the Lithography Optics Division in Oberkochen/Germany, it gets manufactured in Jena.
Carl Zeiss
The Carl Zeiss Group is a leading group of companies operating worldwide in the optical and opto-electronic industries. Carl Zeiss offers innovative solutions for the future-oriented markets of Medical and Research Solutions, Industrial Solutions, Eye Care and Lifestyle Products. During fiscal year 2009/10 the group of companies generated revenues of around EUR 2.98 billion. From fiscal year 2010/11 onward, eyeglass lens manufacturer Carl Zeiss Vision will be integrated as an autonomous business group (revenues of EUR 880 million in fiscal year 2009/10). The Carl Zeiss Group now has approximately 24,000 employees, including more than 10,000 in Germany. The Carl Zeiss business groups hold leading positions in their markets. Carl Zeiss AG, Oberkochen, is fully owned by the Carl Zeiss Stiftung (Carl Zeiss Foundation).
Carl Zeiss SMS
The Semiconductor Metrology Systems (SMS) division is part of the Semiconductor Technology Group of Carl Zeiss. As a leading global supplier of both metrology and manufacturing equipment Carl Zeiss SMS focuses on a key component in semiconductor manufacturing, the photomask. Core expertise in light and electron optics, complemented by a revolutionary femtosecond laser technology form the foundation of a product portfolio comprising in-die metrology, actinic qualification, repair, and tuning of photomasks. The division is headquartered in Jena and has two further sites in Rossdorf/Germany and Karmiel/Israel. Approximately 200 people work for Carl Zeiss SMS. Further information:
Source: Carl Zeiss (press release)
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