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Posted: Mar 21, 2011
Bruker Announces DektakXT, the New Standard in Stylus Profilometry
(Nanowerk News) Bruker today announced
DektakXT™, a revolutionary new stylus profiler that is the first
production system with sustained repeatability of under five
angstroms. This major milestone in stylus profiler surface
metrology performance is the culmination of Dektak's forty-year
legacy of innovation.
The tenth generation of Dektak® systems, DektakXT features a
number of other "firsts" in stylus profiler history, including a unique,
"single-arch" design with enhanced metrology features, the first 64-
bit, parallel processing software architecture (Bruker's powerful
and intuitive Vision64™ operating and analysis software) and the
first true-color, HD resolution camera. Together, these new
capabilities enable DektakXT to deliver industry-leading
nanometer-scale film thickness and surface texture
measurements with improved gage repeatability and up to 40% faster scan performance. DektakXT provides
optimal results for a wide range of metrology applications where the combination of repeatable nanoscale
measurements, throughput and low total cost of ownership is essential.
Bruker Dektak®XT 10th Generation Stylus Profiler
"Over the past forty years, Dektak has become one of the most trusted names in the nanotechnology industry,"
said Mark R. Munch, Ph.D., President, Bruker Nano Surfaces Division. "With best-in-class throughput and
record setting sub-five Angstrom gage repeatability, DektakXT lives up to the Bruker legacy of innovation by
delivering unprecedented levels of performance, precision and value that once again set the bar for stylus
"DektakXT combines the best features of nine prior generations with substantial improvements that include the
new single-arch design, Vision64 software, low noise floor technology and integrated scalability," added Ross Q.
Smith, Vice President and General Manager of Bruker's Stylus and Optical Metrology Business. "We anticipate
that DektakXT's enhanced capabilities and value will be as instrumental in enabling the next wave of nanoscale
material science innovations and production as its predecessors."
Widely used in microelectronics, semiconductor, display, solar, high-brightness LED, medical, scientific and
materials science markets, Dektak stylus profilers are an essential precision metrology instrument found in
literally hundreds of production, research and failure analysis facilities around the world. Dektak systems are
employed in both 2D profilometry and 3D surface profiling applications to measure nanometer film thicknesses
and step heights, 2D and 3D stress and other critical surface parameters that are vital in R&D, process
development and Quality Assurance & Quality Control (QA/QC) applications. With nearly one-thousand Dektak
150 units and approximately ten-thousand Dektak family systems sold to date, Dektak has become the de facto standard stylus profiler for the material sciences industry with a brand that has unprecedented customer loyalty
and which is synonymous with repeatable, reliable nanoscale metrology.
DektakXT incorporates the best features from previous Dektak systems, enhanced with a number of watershed
innovations that further the state of the art in stylus profilers. With its revolutionary "single-arch" design and
"smart-electronics" implementation, DektakXT features a lower noise floor and improved precision that enables
the system to sustain a sub-five-angstrom (<0.5nm) repeatability figure. DektakXT also features a new scanning
subsystem and λ/10 optically flat reference that enables improved baseline stability with up to forty percent
faster scan speeds, while preserving Dektak's legendary system accuracy. Now equipped with Vision64,
DektakXT is the first stylus profiler to feature a 64-bit, parallel processing software architecture that greatly
accelerates data acquisition and analysis, while providing access to over 200 distinct analyses. It is also the first
stylus profiler to support a high-definition, true-color camera for enhanced resolution and image clarity of sample
surfaces. Finally, DektakXT employs Dektak's unique single sensor head design for optimum scanning flexibility
and "Easy Tip Exchange" feature that enables rapid exchange of stylus tips to address a wide range of
DektakXT at SVC TechCon 2011
DektakXT will be demonstrated in Bruker Booth No. 409 at the Society of Vacuum Coaters (SVC) TechCon
2011 in Chicago, IL, on April 19-20, 2011. For more information on DektakXT, or to schedule a demo or an
appointment at SVC, please call +1 (520) 741-1044 ext. 3, email firstname.lastname@example.org or visit
About Bruker Corporation
Bruker Corporation is a leading provider of high-performance scientific instruments and solutions for molecular
and materials research, as well as for industrial and applied analysis. For more information about Bruker
Corporation, please visit www.bruker.com.