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Posted: Mar 21, 2011

Bruker Announces DektakXT, the New Standard in Stylus Profilometry

(Nanowerk News) Bruker today announced DektakXT™, a revolutionary new stylus profiler that is the first production system with sustained repeatability of under five angstroms. This major milestone in stylus profiler surface metrology performance is the culmination of Dektak's forty-year legacy of innovation.
The tenth generation of Dektak® systems, DektakXT features a number of other "firsts" in stylus profiler history, including a unique, "single-arch" design with enhanced metrology features, the first 64- bit, parallel processing software architecture (Bruker's powerful and intuitive Vision64™ operating and analysis software) and the first true-color, HD resolution camera. Together, these new capabilities enable DektakXT to deliver industry-leading nanometer-scale film thickness and surface texture measurements with improved gage repeatability and up to 40% faster scan performance. DektakXT provides optimal results for a wide range of metrology applications where the combination of repeatable nanoscale measurements, throughput and low total cost of ownership is essential.
Bruker DektakXT 10th Generation Stylus Profiler
Bruker Dektak®XT 10th Generation Stylus Profiler
"Over the past forty years, Dektak has become one of the most trusted names in the nanotechnology industry," said Mark R. Munch, Ph.D., President, Bruker Nano Surfaces Division. "With best-in-class throughput and record setting sub-five Angstrom gage repeatability, DektakXT lives up to the Bruker legacy of innovation by delivering unprecedented levels of performance, precision and value that once again set the bar for stylus profiler systems."
"DektakXT combines the best features of nine prior generations with substantial improvements that include the new single-arch design, Vision64 software, low noise floor technology and integrated scalability," added Ross Q. Smith, Vice President and General Manager of Bruker's Stylus and Optical Metrology Business. "We anticipate that DektakXT's enhanced capabilities and value will be as instrumental in enabling the next wave of nanoscale material science innovations and production as its predecessors."
Widely used in microelectronics, semiconductor, display, solar, high-brightness LED, medical, scientific and materials science markets, Dektak stylus profilers are an essential precision metrology instrument found in literally hundreds of production, research and failure analysis facilities around the world. Dektak systems are employed in both 2D profilometry and 3D surface profiling applications to measure nanometer film thicknesses and step heights, 2D and 3D stress and other critical surface parameters that are vital in R&D, process development and Quality Assurance & Quality Control (QA/QC) applications. With nearly one-thousand Dektak 150 units and approximately ten-thousand Dektak family systems sold to date, Dektak has become the de facto standard stylus profiler for the material sciences industry with a brand that has unprecedented customer loyalty and which is synonymous with repeatable, reliable nanoscale metrology.
About DektakXT
DektakXT incorporates the best features from previous Dektak systems, enhanced with a number of watershed innovations that further the state of the art in stylus profilers. With its revolutionary "single-arch" design and "smart-electronics" implementation, DektakXT features a lower noise floor and improved precision that enables the system to sustain a sub-five-angstrom (<0.5nm) repeatability figure. DektakXT also features a new scanning subsystem and λ/10 optically flat reference that enables improved baseline stability with up to forty percent faster scan speeds, while preserving Dektak's legendary system accuracy. Now equipped with Vision64, DektakXT is the first stylus profiler to feature a 64-bit, parallel processing software architecture that greatly accelerates data acquisition and analysis, while providing access to over 200 distinct analyses. It is also the first stylus profiler to support a high-definition, true-color camera for enhanced resolution and image clarity of sample surfaces. Finally, DektakXT employs Dektak's unique single sensor head design for optimum scanning flexibility and "Easy Tip Exchange" feature that enables rapid exchange of stylus tips to address a wide range of applications.
DektakXT at SVC TechCon 2011
DektakXT will be demonstrated in Bruker Booth No. 409 at the Society of Vacuum Coaters (SVC) TechCon 2011 in Chicago, IL, on April 19-20, 2011. For more information on DektakXT, or to schedule a demo or an appointment at SVC, please call +1 (520) 741-1044 ext. 3, email or visit
About Bruker Corporation
Bruker Corporation is a leading provider of high-performance scientific instruments and solutions for molecular and materials research, as well as for industrial and applied analysis. For more information about Bruker Corporation, please visit
Source: Bruker AXS (press release)
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