The latest news from academia, regulators
research labs and other things of interest
Posted: Mar 28, 2011
Australian Institute welcomes Vistec Electron Beam Technology
(Nanowerk News) Vistec Lithography, Inc. a leading supplier of Electron Beam Lithography systems is
pleased to announce the delivery and successful installation of the
EBPG5000pES Lithography system at the newly established Melbourne Centre for
Nanofabrication (MCN) in Australia. The MCN will be performing research in
the areas of nanostructures and a wide range of other applications also
associated with the nearby Australian Synchrotron.
The MCN is a collaborative initiative between the Victorian and Federal
Government, the Commonwealth Scientific and Industrial Research Organisation
(CSIRO), Monash University, the University of Melbourne, LaTrobe University,
Deakin University, the Royal Melbourne Institute of Technology and Swinburne
"Our institute benefits from one of the most powerful nano-technology
instruments", said Doctor Abid Khan, Senior Research Strategist and former
Director of the Monash Institute for Nanoscience and Manufacture. "This
investment ensures that we remain at the cutting edge of nano-research
throughout the next decade and in many respects, the facility is the doorway
to further success for engineers and scientists nationwide."
The EBPG5000pES is based upon reliable and well-proven system architecture.
Its 100kV electron-optics provides a spot size down to <2.2nm, which enables
nano-lithography structures smaller than 8nm to be routinely generated. The
system incorporates an interactive graphical user interface (GUI) that
provides ease of use for diverse, multiuser, University type environments.
Due to these features and its high degree of flexibility and user-friendly
interface, the EBPG Series is appreciated worldwide in leading Research
Centres and Universities with more than 80 systems shipped.
The machine will help the MCN to develop new technologies. "We will be able
to write and etch features on surfaces in an extremely small size. This
technique is used for applications such micro-texturing of surfaces,
manufacture of micro and nano-fluidic devices and x-ray optical elements,"
Dr. Khan said.
Rainer Schmid, General Manager at Vistec Lithography Inc., comments on the
successful Customer Acceptance Test: "We are proud, that all tests have been
carried out successfully in a very short time and we now can refer to our
first EBPG system in Australia." Having received several EBPG orders within
the past year, the latest evaluation clearly indicates that Vistec's product
family is the system of choice for the requirements of Universities and
Research institutes. Schmid: "In the upcoming year we would like to continue
our positive development and further strengthen our worldwide market
Melbourne Centre for Nanofabrication
The Melbourne Centre for Nanofabrication, the Victorian Node and
headquarters of the Australian National Fabrication Facility (ANFF). It is a
brand new multi-user research facility, operating the largest purpose-built
cleanroom complex in the Southern Hemisphere. Drawing upon the wealth of
knowledge within six Universities and CSIRO, MCN is uniquely placed in a
thriving cosmopolitan world-centre enabling it to bridge the gaps between
scientific disciplines and commercial needs.
MCN offers open access to leading edge, state of the art equipment and
processes for all sectors of industrial, research and academic community,
both local and global.
Current expertise is provided in the areas of advanced materials and
biotechnology, leading to the development of a wide range of customised
sensors, actuators, and devices applied to areas from biomedicine, and
energy to nanoelectronics and the environment.
Vistec Electron Beam Lithography Group
The Vistec Electron Beam Lithography Group is a global manufacturer and
supplier of electron-beam lithography systems with applications ranging from
nano and bio-technology to photonics and industrial environments like mask
making or direct writing for fast prototype development and design
evaluation. The Vistec Electron Beam Lithography Group combines Vistec
Electron Beam and Vistec Lithography.
Vistec Lithography develops, manufactures, and sells electron-beam
lithography equipment based on Gaussian Beam technology. Their electron-beam
systems are world-wide accepted in advanced research laboratories and
universities. The company is located in Watervliet, NY (USA), within the
Capital Region of New York.
Vistec Electron Beam
Vistec Electron Beam is providing electron-beam lithography equipment based
on Shaped Beam technology, which is used by leading semiconductor
manufacturers and many research institutes around the world. Their
innovative electron-beam systems are used for microchip production and
integrated optics as well as for scientific and commercial research. The
company is located in Jena (Germany).