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Posted: Apr 11, 2011

AIXTRON Sells First 300mm Graphene System to AIST

(Nanowerk News) AIXTRON SE today announced a new order for the first automated 300mm Black Magic system for Graphene deposition from the National Institute of Advanced Industrial Science and Technology (AIST) in Japan. The unique properties of Graphene make it an extremely promising channel material for next generation microelectronics and high frequency applications.
AIST placed the order in the first quarter of 2011 and the system will be delivered in the third quarter of 2011. The system will be installed in the AIST Super Clean Room at Tsukuba and commissioned by the local AIXTRON support team.
The AIXTRON automated Black Magic Graphene system met the very challenging requirements by the project group of Synthesis and Transfer Application of Graphene at the Collaborative Research Team Green Nanoelectronics Center (GNC). The system will be used for the development and application of Nanocarbon materials, which is one of the three main research assignments of GNC established at AIST in April 2010.
Dr. Ken Teo, Director of Nanoinstruments at AIXTRON, comments, "We are providing the most technologically advanced platform for Graphene production available today and I believe it is the world's first 300mm size commercial system ever sold. The reactor has extraordinary temperature uniformity and a sophisticated gas delivery system which has been designed for precise precursor delivery. The system also includes our ARGUS in-situ thermal mapping system. An automated handler and multi-wafer loadlock are integrated for high throughput."
Headquartered in Tsukuba and Tokyo, Japan, the National Institute of Advanced Industrial Science and Technology (AIST), led by President Nomakuchi, is a public research institution funded mainly by the Japanese government. AIST has over 40 autonomous research units in various innovative research fields, and the units are located at nine research bases and several sites (smaller than research bases) of AIST all over Japan. AIST was ranked in the top 10 Japanese Research Institutions for All Fields 1998-2008 by Thomson Reuters.
GNC is supported by the Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program) which aims to encourage leading-edge research and development to strengthen Japan's international competitiveness and contribute to the society and people's welfare. This program was approved by the Council for Science and Technology Policy, Cabinet Office, Government of Japan in 2009. GNC research and development activities are performed in collaboration with visiting researchers from industrial partner companies.
Source: AIXTRON (press release)
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