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Posted: Apr 19, 2011

RUSNANO Begins Financing Production of Vacuum Units for Micro- and Nanoelectronics

(Nanowerk News) RUSNANO has made its first co-investment in a project to expand production of ESTO-Vacuum automated vacuum units. The project has a total budget of one billion rubles. RUSNANO will co-invest 198.5 million rubles in the project. ESTO-Vacuum expects to reach design capacity of 60 units per year in 2016.
ESTO-Vacuum produces equipment used mainly in pilot and small-batch production of electronics, micro- and nanoelectromechanical devices and quartz microresonators. The units also have applications in electron-beam and magnetron deposition, ion and plasma etch chemistry, and PVD and CVD deposition* to form functional coverings.
"The project company produce equipment that combines several high-vacuum chambers, capable to fulfill various operations sequentially. Those processes can be technologically very complex. Domestic products in this segment are going to be serious competitors to imported counterparts. ESTO-Vacuum's share of the market will grow," said RUSNANO managing director Konstantin Demetriou.
The ESTO-Vacuum units execute mixed technological processes to create intricate, multicomponent structures, for example, lasers and light-emitting diodes of arsenide and nitride gallium and indium phosphide. The equipment is suitable to many other applications: moisture sensors using nanopipes, magnetic sensors using alternating nanometer layers of magnetic and nonmagnetic materials, strain-gauge sensors in which monosulphide samarium is less than 100 nanometers thick, and a host of other uses.
*PVD (physical vapor deposition) is a technology for depositing coatings in a vacuum; coating occurs through direct condensation of the vaporized gas. CVD (chemical vapor deposition) is a method of obtaining thin film and particulate matter through high temperature degradation reactions and/or the interaction of gaseous precursors on the substrate (for film) or in the reactor.
Russian experts estimate that the Russian market for vacuum equipment in 2009 was $30, which is 0.2 percent of the global market. During the period 2010–2015, the Russian market, per baseline forecast, is expected to grow 21.3 percent annually. Optimistic prognoses—considering replacement of outdated methods such as electrolytes, the high degree of wear in the country's technical equipment, and pent-up demand for PVD and CVD equipment—put annual growth in the market at as much as 29 percent.
RUSNANO was established in March 2011 as an open joint-stock company through reorganization of state corporation Russian Corporation of Nanotechnologies. RUSNANO's mission is to develop the Russian nanotechnology industry through co-investment in nanotechnology projects with substantial economic potential or social benefit. The Government of the Russian Federation owns 100 percent of the shares in RUSNANO. Anatoly Chubais is chairman of the Executive Board of RUSNANO.
Work to establish nanotechnology infrastructure and training for nanotechnology specialists, formerly conducted by the Russian Corporation of Nanotechnologies, has been entrusted to the Fund for Infrastructure and Educational Programs, a non-commercial fund also established through reorganization of the Russian Corporation of Nanotechnologies. www.rusnano.com
Source: RUSNANO (press release)
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