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Posted: Apr 21, 2011

Complex 3D-nano patterns with indentation lithography and piezo technology

(Nanowerk News) A collaboration between the Whitesides Group at Harvard University and CSM Instruments has culminated in an important advance in lithography of different materials at the nanoscale. The motivation for this development was the ability to produce unique lithographical patterns of different shapes and sizes for use in research applications (e.g. lab-on-a-chip) where conventional techniques such as electron-beam lithography (EBL) and photolithography cannot be used. The new method utilizes the standard Ultra Nanoindentation Tester (UNHT) and the Nano Scratch Tester (NST) without anymodification.
The precise shape of the patterns is achieved with a PI (Physik Instrumente) P-733.2CD piezo nanopositioning scanning stage which is mounted directly on the Open Platform and allows sub-nanometer positioning resolution in the X and Y axes.
Download the technote Indentation Lithography Enables Complex 3D-Nano Patterns (pdf).
About CSM
CSM Instruments has been leader in the development of instruments for surface mechanical properties characterization for over 30 years in both research and industrial fields. CSM Instruments provides equipment that allow the mechanical characterization of a wide range of surfaces and bulk materials. Adhesion of paints, optical thin films or hard coatings can be defined using one of our Scratch Testers. These span the nano to the macro range to analyze the widest range of materials. More: http://www.csm-instruments.com/en/Nano-Scratch
About PI
PI is a leading manufacturer of precision motion control equipment, piezo nanopositioning systems, piezo motors and actuators for photonics, bio-nanotechnology, medical engineering & semiconductor applications. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries, R&D / engineering on 3 continents and total staff of 500+ PI USA designs and manufactures piezo products at the company's US headquarters in Auburn, MA.
Source: PI
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