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Posted: Aug 16, 2011

Bruker's AcuityXR Receives R+D 100 Award for Technological Innovation

(Nanowerk News) The Bruker Nano Surfaces division today announced that it has been selected for an R&D 100 Award for AcuityXR™ enhanced-resolution microscopy technology. This novel optical surface profiler mode combines patent-pending hardware and software to enable select models of Bruker's ContourGT® 3D Optical Microscopes to break the optical diffraction limit and deliver lateral resolutions that were previously considered impossible to achieve. Winners of the R&D 100 Awards are selected by an independent judging panel and the editors of R&D Magazine as the 100 most technologically significant products introduced into the marketplace over the past year.
"Bruker is pleased to have again been recognized by the R&D 100 award committee," said Mark R. Munch, Ph.D., President of the Bruker Nano Surfaces division. "Prior to this year, instrumentation developed at our facilities has earned seven additional R&D 100 Awards, including four for optical metrology and three for atomic force microscopy. We are gratified that with AcuityXR we can provide our customers with previously unattainable optical metrology performance, and look very much forward to the innovations they will accomplish with these new capabilities."
Robert M. Loiterman, Vice President and General Manager of Bruker's Stylus and Optical Metrology business, added: "ContourGT systems equipped with the award-winning AcuityXR technology have shown resolution of features below 130 nanometers in width, which is unprecedented in three-dimensional optical microscopy. With AcuityXR, dimensional repeatability on narrow structures has been shown to improve by more than a factor of five, showing a true metrology benefit in semiconductor, medical and precision machining applications where feature sizes are rapidly shrinking, even as the demands for quality are increasing."
About the ContourGT 3D Optical Microscopes
Exclusively available on the ContourGT-K1, -X3, and -X8 models, AcuityXR joins a long list of innovations available for Bruker's ContourGT family of non-contact, 3D optical microscopes. These systems combine Bruker-patented high-brightness dual-LED illumination with superior vertical resolution to greatly improve sensitivity and stability. This enables precision 3D surface metrology in difficult applications and harsh environments that are challenging for other optical-based systems. ContourGT metrology solutions range from manual bench-top models to fully automated, self-calibrating production floor systems. The systems incorporate Bruker's patent-pending Vision64™ operating and analysis software and the industry's most intuitive, modular user interface that together provide user-level-customization capabilities for a wide range of surface profiling metrology applications. For more information on AcuityXR or the ContourGT, or to schedule a demo, please call +1 (520) 741-1044 ext. 3, email or visit
About Bruker Corporation
Bruker Corporation is a leading provider of high-performance scientific instruments and solutions for molecular and materials research, as well as for industrial and applied analysis. For more information about Bruker Corporation, please visit
Source: Bruker (press release)
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