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Posted: Oct 03, 2011

Tegal Announces Extension of Bid Deadline for Nanolayer Deposition Patent Portfolio

(Nanowerk News) Tegal Corporation announced that bids for the company's intellectual property portfolio for Nanolayer Deposition Technology (NLD™) will be accepted until 5 p.m. PDT on October 15, 2011. Tegal extended the bid deadline, originally set for today, after several additional IC and semiconductor equipment manufacturers expressed interest in the IP portfolio.
NLD™ is a process technology that bridges the gap between high throughput, non-conformal chemical vapor deposition (CVD) and highly conformal, low throughput atomic layer deposition (ALD). The portfolio includes over 35 US and international patents in the areas of pulsed-CVD, plasma-enhanced ALD, and NLD™.
"The NLD™ technology provides a number of options for meeting the needs of advanced semiconductor processing technology, particularly with the drive toward 3D structures," says Robert Ditizio, Chief Technologist for Tegal Corporation. "Tegal's NLD™ portfolio provides technology for extending the life of conventional CVD process hardware without the need to move completely to lower-throughput, precursor-limited ALD processes."
Additional information about the portfolio is available on Tegal's website.
About Tegal
Since its founding in 1972, Tegal Corporation has been dedicated to the development and application of emerging technologies. Often on the forefront of major inventions, Tegal's process and capital equipment know-how enabled the development and manufacturing of leading-edge devices from early microprocessors to advanced memory and LEDs, as well as to newest filtering and sensing devices that are present in the most advanced smart phones. Tegal is currently marketing its substantial NLD™ Intellectual Property Portfolio (which includes over 35 granted patents and applications) to interested parties. Through its recent investment in sequel Power, Tegal is engaged in the promotion of solar power plant development projects worldwide and other renewable energy projects. In addition, Tegal is actively evaluating opportunities for partnerships with other diversified technology-based companies in order to exploit our shared experience and to enhance our value as a public company. Tegal is headquartered in Petaluma, California. Please visit us on the web at
Source: Tegal (press release)
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