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Posted: Oct 25, 2011
Picosun Introduces Next Generation of Picoplatform ALD Cluster Tool
(Nanowerk News) Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) equipment, introduces renewed, next generation PICOPLATFORM™ ALD cluster tool for integrated circuits (IC) industry applications. Updated version of the fully automated cluster system has already been selected by customers on three continents this year. Existing users keep on praising the excellent film uniformity, low particle levels, high throughput, flexibility, easy usability and maintenance and small footprint of the systems, enabling smooth and cost-effective transition from R&D to production - characteristic of all Picosun's products.
PICOPLATFORM™ cluster is based on a central vacuum robot transfer unit, into which up to four independent ALD reactors and other processing modules have been connected. The robot unit enables fully automatic, pre-programmed cassette-to-cassette loading and moving of substrates between the independent processing modules, cooling station and load lock without breaking the vacuum between the process steps. The system can be built UHV compatible and it is capable of simultaneously running several different ALD and plasma-enhanced ALD processes from the more conventional ALD materials such as oxides, nitrides and sulfides to challenging metals and even polymers on Si wafers up to 300 mm (12 inch) in diameter. System is also available for square wafers for solar cell applications.
"ALD is a central manufacturing technique in today's IC industries and the level of Picosun's ALD know-how is again proven by the success of PICOPLATFORM™ cluster tool. With its unparalleled versatility and multi-functionality, PICOPLATFORM™ not only saves valuable process time but enables development and manufacturing of completely new, innovative structures and devices combining novel materials and processes without compromising even the strictest of quality requirements of the IC industry. We at Picosun are proud to introduce our ALD technology to this field to enable cutting-edge research and production of advanced IC devices", summarizes Picosun's Managing Director, Juhana Kostamo.
Picosun Oy is a Finland-based global manufacturer of state-of-the-art ALD systems, representing continuity to almost four decades of dedicated, exclusive ALD reactor design and manufacturing. Picosun's global headquarters are located in Espoo, Finland and its US headquarters in Detroit, Michigan. Picosun's SUNALE™ ALD tools are chosen for production by various industries across four continents. Picosun Oy is a part of Stephen Industries Inc. Oy.