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Posted: Nov 29, 2011

UC Berkeley names Professor David Graves as first Lam Research Distinguished Chair in Semiconductor Processing

(Nanowerk News) Lam Research Corporation, a major supplier of semiconductor wafer fabrication equipment and services, today announced UC Berkeley's appointment of Professor David Graves as the first chair holder of the Lam Research Distinguished Chair in Semiconductor Processing. The Lam Research Distinguished Chair endowment is the first ever for the Berkeley Nanosciences and Nanoengineering Institute (BNNI), the umbrella organization for expanding and coordinating Berkeley research and educational activities in nanoscale science and engineering. This 5-year appointment, which began July 2011, will support research for the advancement of nano-science and engineering.
Part of a strategic relationship initiated by Lam Research in 2008, the Lam Research Distinguished Chair is endowed for a total of $3 million. The Lam Research Foundation is funding $1.5 million. The William and Flora Hewlett Foundation's Endowed Chair Challenge fund, which seeks to endow 100 new faculty chairs in multiple academic areas at UC Berkeley, will match this amount.
"We are extremely pleased that the university has chosen Professor Graves as Distinguished Chair in Semiconductor Processing, BNNI, UC Berkeley," said Rick Gottscho, senior vice president of Global Products at Lam Research. "Professor Graves is an unconventional and creative thinker who has been a pioneer in advancing the understanding of plasmas and their application in etch, deposition, and the modification of surfaces for many years. He is an exceptional mentor and teacher, who has helped prepare countless students for both industry and academic fields, developing them into exceptional leaders who truly make a difference."
"We are delighted by the appointment of Professor David Graves as the first Lam Research Distinguished Chair at UC Berkeley," said Robert J. Birgeneau, Chancellor, Professor of Physics and Professor of Materials Science and Engineering, UC Berkeley. "Professor Graves is well known for his expertise and work in semiconductor processing science and technology. This appointment is due to recognition of his outstanding contributions to the field. We are grateful to Lam Research for the generous gift that established this chair, funded a number of graduate fellowships, and provided new equipment and support to the Marvell Nanofabrication Laboratory at UC Berkeley. Lam's commitment to help sustain excellence at UC Berkeley is exemplary, and we are pleased by how the UC Berkeley-Lam Research relationship has grown over time."
Professor Graves holds a Ph.D. from the University of Minnesota. Over the years, he has been recognized with several prestigious awards, including the Plasma Science and Technology Division of the AVS Plasma Prize and election as an AVS Fellow in 2001. Professor Graves' research interests are in plasma processing and electronic materials. His research group at UC Berkeley focuses on the fundamentals and applications of weakly to partially ionized gases, or plasmas, to technological problems, primarily in the microelectronics industry.
Source: Lam Research
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