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Posted: Jan 21, 2012
Heidelberg Instruments to Support Nano and Biotechnology Research Division at the Daegu Gyeongbuk Institute of Science and Technology
(Nanowerk News) Heidelberg Instruments announced the sale of an advanced DWL 4000 maskless laser lithography system to the Division of Nano and Biotechnology Research at the Daegu Gyeongbuk Institute of Science and Technology (DGIST), South Korea.
The DWL 4000 system will enable the user to expose minimum structures on photoresist down to 0.6 microns, with an active write area of up to 400 mm by 400 mm.
"At DGIST, extensive research is conducted on a wide variety of technology topics ranging from nanostructure-based fiber manufacturing and biomedical diagnosis & treatment to developing materials and devices for energy industry, in order to shape the future of the regional and national industries. The DWL 4000 will play a crucial role with its versatile capabilities such as grey scale exposure, ability to expose thick resist and state of the art layer to layer alignment," states Alexander Forozan, Head of Global Sales and Business Development
About Heidelberg Instruments, GmbH
With an installation base in over 40 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications. http://www.himt.de