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Posted: Mar 26, 2012
Finnish Research Centre Selects Cutting Edge Nanotechnology from Vistec
(Nanowerk News) Vistec Lithography Inc. (www.vistec-semi.com) announced today that Micronova Nanofabrication
Centre (www.micronova.fi) has selected one of its electron-beam lithography
systems. The leading nanotechnology laboratory in Finland aims to use
Vistec's EBPG5000plusES for the design, development and fabrication of
micro- and nanosystems. The cutting edge technology is specialized for
multi-user environments and is therefore a future-proof match to the needs
At Micronova more than 360 employees and students of different facilities
carry out research in diverse fields of nanotechnology. The Finnish
institute aims to use the system for research in the fields of
nanoelectronics, nanofabrication, microelectronics, nanophotonics and
microfabrication. "This state-of-the-art electron-beam lithography system
gives us the possibility to continue future-proof research at the very
highest level. But not only the characteristics of the system determined our
decision also the long term experience of Vistec in this field of research
were decisive", comments Dr. Veli-Matti Airaksinen, director of Aalto
Nanofab at Micronova, the acquisition of the new system.
The Vistec EBPG5000pES is a high-performance lithography tool based on
reliable and well-proven system architecture. The system is equipped for
true 100kV / 1mm performance under regular electron-optical conditions with
a wide capability for high throughput applications. Rainer Schmid, General
Manager Vistec Lithography, Inc., explains further characteristics: "Its
electron-optical column, rated for acceleration voltages of 50 and 100kV,
enables the EBPG5000pES to provide a spot size down to < 2.2nm. On the other
hand nano-lithography structures smaller than 8nm can easily be generated."
Furthermore the system incorporates an interactive graphical user interface
(GUI). "With this feature we enable the use for diverse, multiuser
environments such as used at huge research institutes like Micronova or
"Micronova is one of the most scientific nano-research institutes in Europe.
Therefore we are glad to have come to this agreement", comments Schmid the
order. By providing a steady growing number of advanced research institutes
and universities with electron-beam lithography systems Vistec has
demonstrated that its technology is state-of-the-art and best choice.
"Vistec is known for its great support to its customers. But not only do our
customers benefit from the cooperation, we do it as well. Having such a
strong connection to cutting edge research institutes like Micronova enables
us to continue the development of our technology to the demands of an even
wider target group."
Micronova Nanofabrication Centre is Finland's National Research
Infrastructure for micro- and nanotechnology, jointly operated by Aalto
University and VTT Technical Research Centre of Finland. Micronova's
activities extend from fundamental physics to device prototyping, applied
research and small-scale manufacturing. Technologies developed at Micronova
include nanoelectronic and photonic devices, MEMS sensors, particle and
X-ray detectors and THz technology.
VTT Technical Research Centre of Finland
VTT Technical Research Centre of Finland is a leading multi-technological
applied research organization in Northern Europe. VTT creates new technology
and science-based innovations in co-operation with domestic and foreign
partners. VTT's turnover is EUR 290 million and its personnel totals 3,100.
Vistec Electron Beam Lithography Group
The Vistec Electron Beam Lithography Group is a global manufacturer and
supplier of electron-beam lithography systems with applications ranging from
nano and bio-technology to photonics and industrial environments like mask
making or direct writing for fast prototype development and design
evaluation. The Vistec Electron Beam Lithography Group combines Vistec
Lithography and Vistec Electron Beam.