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Posted: Apr 02, 2012
Bruker Nano Surfaces Division Ships 100th DektakXT Stylus Profiler
(Nanowerk News) Bruker Nano Surfaces Division (Tucson, AZ) has
shipped 100 DektakXT™ Stylus Surface Profiling System since the
product launched last April. The DektakXT features improved ease of
use and the industry's best step height repeatability of better than 5
angstroms, 1 sigma. These and other performance characteristics
have already made DektakXT the new industry standard for
monitoring thin film deposition and etch systems in solar, FPD, HBLED,
and semiconductor research.
DektakXT Stylus Surface Profiling System
"We are delighted to select Dektak XT as the quality control method to
Jinjing's process control system," stated, Mr. Sun, Quality Manager for
Jinjing Group in China, who purchased the 100th system. "The
decision was made not only based on previous experience with
Dektak profilers, but also because Dektak profilers are popular tools in China's solar market for both Si-based
and the thin film solar industry. In addition, we are really glad to see the new features that the DektakXT offers."
"DektakXT combines the best features of ten generations of Dektak stylus profilers and adds substantial
improvements in measurement repeatability, ease of use and versatility," explained Robert Loiterman, Executive
Vice President and General Manager of Bruker's Stylus and Optical Metrology Business. "We are pleased with
its rapid adoption as the industry standard and that its features and performance are providing our customers
enhanced capabilities and value in many markets."
The DektakXT incorporates a new scanning subsystem and λ/10 optically flat reference that improves baseline
stability with up to forty percent faster scan speeds, while preserving Dektak's legendary system accuracy.
Equipped with Vision64™ software, DektakXT is the first stylus profiler to feature a 64-bit, parallel processing
software architecture that greatly accelerates data acquisition and analysis. It features a new "Quick-Analyzer"
mode with fast, one button analysis of such parameters as average step height and surface texture. It is also the
first stylus profiler to support a high-definition, true-color camera for enhanced resolution and image clarity of
sample surfaces. Finally, DektakXT employs Dektak's unique single-sensor head design for optimum scanning
flexibility and "Easy Tip Exchange" feature that enables rapid exchange of stylus tips to address a wide range of
Source: Bruker Nano Surfaces (press release)
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