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Posted: Apr 03, 2012
IS40 Ion Source Range for Surface Analysis from Henniker Scientific
(Nanowerk News) The new IS40 ion source range from Henniker Scientific
addresses both surface preparation and surface analysis
applications under UHV conditions.
The IS40E is a differentially pumped scanning ion gun with
two lens extractor type source for depth profiling in SIMS
and XPS applications. The two lens system allows easy
and continuous variation of micrometer spot size over the
primary energy range of 0.15 keV to 5 keV and with beam
current density of up to 4 mA/cm2.
The slim profile and specially designed nose-cone angle of
50° ensure best fit even in crowded chamber environments.
The filament is non-line-of-sight to the sample, thereby
minimising contamination from the source. It is field
replaceable with non-critical alignment and long lifetime,
making replacement both quick and economical compared
with other designs.
The IS40C is a compact, easy-to-use extractor type ion
flood source for sample surface cleaning. The ion flood
source generates a current of 15-25 µA/cm2 (argon) with
Gaussian beam profile. The mounting length of the ion
flood gun is adaptable to individual requirements.
Both sources are controlled via web browser or from
a single Windows™ software package but can also be
supplied as .dll modules for integration with existing
Source: Henniker Scientific (press release)
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