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Posted: Apr 16, 2012
3D Laser Lithography System Employs XYZ Nano-Positioning Stage
(Nanowerk News) Piezo nano-positioning systems specialist PI (Physik Instrumente) provides a 3-axis nano-positioning stage that is employed in a novel laser lithography system by Nanoscribe GmbH. The lithography system can produce complex 3-dimensional structures, fully automatic and repeatable with a precision and flexibility previously unavailable. Sub-micron structures with sizes of up to 1 mm und widths to 150 nm are feasible
Piezo: The driving Force
The driving force of Nanoscribe's laser lithography system is a PImars P-563 flexure-guided, piezo-driven nanopositioning XYZ stage from PI. It provides positioning ranges to 300x300x300 microns and nanometer scale repeatability. A parallel-metrology position feedback system based on highly linear capacitive sensors is integrated and allows the sample to be moved precisely and repeatedly in relation to the laser focus. A digital piezo motion controller provides the necessary path control on a nanometric scale.
The high accuracy and fast response of the piezoelectric nano positioning stage makes it possible to equip surfaces with particular biometric characteristics or to create microstructures for small pumps and needles.. Typical applications for 3D laser lithography are the creation of three-dimensional structures for cell biology.
Nano-Positioning Stage in the Nanoscribe Lithography System (Photo: Nanoscribe) and 3D Bio-Structures Photo: B. Richter, M. Bastmeyer, KIT)
PI is a leading manufacturer of precision motion control equipment, piezo systems, piezo motors and actuators for medical engineering, photonics, bio-nano-technology, & semiconductor applications. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries, R&D / engineering on 3 continents and total staff of 700+
PI USA designs and manufactures piezo products at the company's US headquarters in Auburn, MA.