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Posted: Apr 17, 2012

JEOL Introduces New Versatile FE-SEM Series for Sub-Nanometer Imaging and Analysis of Nanostructures and Magnetic Samples

(Nanowerk News) JEOL launches a new series of Field Emission Scanning Electron Microscopes (FE-SEM) that offer expanded imaging and analysis capabilities customizable to performance requirements. The JEOL JSM-7100F series offers sub-1 nm imaging capabilities and analytical characterization at the sub-100nm scale, accomplished through the combination of large beam currents with a small probe size at any accelerating voltage.
Designed for the budget-conscious lab, the JSM-7100F model is a highly versatile, easy-to-use analytical field emission SEM that offers a new level of expanded performance. Through the unique 'in-lens field emission gun', the SEM delivers ≥ 200 nA of beam current to the sample. An aperture angle control lens (ACL) automatically optimizes both small probe current spot size for high resolution imaging and spot shape for high beam current, high resolution microanalysis, while a beam deceleration mode curtails charging on nonconductive specimens such as ceramics, semiconductors and polymers.
JEOL JSM-7100F
JEOL JSM-7100F
For advanced high resolution capabilities, the JSM-7100FT model features a newly redesigned hybrid lens and through-the lens detectors with energy filter. The superior electron optics design of this SEM column enables high resolution imaging of nanostructures and specimen surface details for any material type, including magnetic samples. With the integration of in-the-lens acceleration and deceleration of the electron beam, low kV aberrations are reduced, yielding higher resolution at the lowest accelerating voltages. Additionally, JEOL's proven beam deceleration mode (GB Mode) decreases charging while imaging non-conductive specimens, improves spot size at low kV, and enhances surface topography.
This new series of Field Emission SEMs offers increased versatility for multiple analytical techniques and imaging and analysis of non-conductive samples. Each microscope model features a turbo molecular pump (TMP) and a rapid specimen exchange airlock to assure a clean vacuum environment is always maintained.
Optional Low Vacuum Operation
The optional LV function (up to 300 Pa) offers additional versatility to both JSM-7100F and JSM-7100FT. The LV function is fully controlled through the microscope user interface and allows all LV orifices to be retracted without breaking vacuum for unrestricted low magnification imaging and maximum beam current (200 nA) in high vacuum. The LV system is equipped with a solid-state BSE detector.
Adaptable for Multiple Analytical Techniques
The JSM-7100F series is equipped with a large specimen chamber that accommodates a wide variety of detectors and accessories simultaneously and without compromising the performance of one another, including: multiple EDS, WDS, STEM, BSE, CL and IR camera. The system can also be equipped with a variety of sub stages including tensile, heating and cooling stages for in situ experimentation.
Enhanced Productivity
JEOL is renowned for its easy to use SEM operating software, graphical user interface, and productivity-enhancing functions. Stored images retain operating conditions and stage coordinates serving effectively as individual recipe functions, which is ideal in the multi-user environment. All image archiving, searching, measurement, report generation, filtering, and montaging can be conducted from the image database.
About JEOL USA, Inc.
JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.
JEOL USA, Inc., a wholly owned subsidiary of JEOL, Ltd., Japan, was incorporated in the United States in 1962. The company has 13 regional service centers that offer unlimited emergency service and support in the U.S. For more information about JEOL USA, Inc. or any JEOL products, visit www.jeolusa.com, or call 978-535-5900.
Source: JEOL (press release)
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