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Posted: Apr 25, 2012

SEMATECH EMI Partnership Members Order Two Extreme Ultraviolet Lithography System AIMS From Carl Zeiss

(Nanowerk News) GLOBALFOUNDRIES, Intel, Samsung Electronics, and TSMC are the members of the SEMATECH EMI Partnership. According to the slot assignment two out of the four semiconductor companies have placed orders with Carl Zeiss Semiconductor Metrology Systems (SMS) Division. Carl Zeiss SMS develops the AIMS™ EUV tool in cooperation with the scanner optics department of Carl Zeiss SMT, Lithography Optics (LIT), and external partners.
"The orders represent an important milestone in the development of AIMS™ EUV and confirm the relevance of EUV technology for the industry. We expect the remaining two EMI members to place their orders in accordance with their slot assignments agreed upon at the start of the EMI consortium." said Dr. Oliver Kienzle, Managing Director of Carl Zeiss SMS. The AIMS™ EUV platform represents a critical tool for the development and manufacturing of defect-free EUVL masks supporting the 22 nm half-pitch (HP) technology node requirements with extendibility to the 16 nm HP node. A first production-worthy version of the platform is scheduled for delivery in the third quarter of 2014.
SEMATECH launched EMI in 2010 to fill a key infrastructure gap for EUV in the area of mask manufacturing, by funding development of critical metrology tools. EMI is administered by SEMATECH's Lithography Program, based at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.
To initiate EMI's first major project, SEMATECH and Carl Zeiss have signed a collaboration agreement for the development and manufacturing of the industry's first-ever actinic aerial image metrology EUV system targeted for EUVL volume production.
Semiconductor Manufacturing Technology
The Semiconductor Manufacturing Technology business group of the Carl Zeiss Group comprises Carl Zeiss SMT and its subsidiaries Carl Zeiss Laser Optics and Carl Zeiss SMS. With a broad portfolio of products and globally leading know-how in the areas of lithography and optical modules, the business group covers various key processes in microchip production: as a developer and manufacturer of lithography optics, for example, Carl Zeiss SMT is a technology and market leader in this sector of the semiconductor industry. The portfolio of Carl Zeiss Laser Optics includes optical components for lithography lasers and subsystems for wafer inspection systems. With its inspection, repair and metrology systems, Carl Zeiss SMS focuses on the photomask, one of the core components of chip fabrication. In fiscal year 2010/11 the three divisions generated revenue of around 1.2 billion euros with a workforce of about 2,100 people. The business group is headquartered in Oberkochen.
Source: Carl Zeiss (press release)
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